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- W2024590553 abstract "The International Technology Roadmap for Semiconductors requires improvements in resolution for each lithographic node. In order to meet the resolution requirements for the sub-65-nm nodes, image placement (IP) errors induced by chucking the mask during e-beam patterning, metrology, and exposure must be characterized and minimized. This study focused on a 200-mm electron projection lithography (EPL) stencil mask designed for high throughput. Finite element models were developed to simulate the response of the mask throughout a typical fabrication process flow, including the electrostatic chucking during e-beam patterning and EPL exposure. The results of this predictive study were used to identify the primary sources of IP error as a function of the system parameters." @default.
- W2024590553 created "2016-06-24" @default.
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- W2024590553 date "2004-12-06" @default.
- W2024590553 modified "2023-09-23" @default.
- W2024590553 title "Simulating the process flow of the Nikon EPL new geometry mask" @default.
- W2024590553 doi "https://doi.org/10.1117/12.569315" @default.
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