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- W2024604186 abstract "It has become more serious concern to quantify Low-k damage in Cu/Low-k interconnects. We investigated the relationship between the amount of OH group in Low-k material obtained from micro-beam IR method and the interconnect capacitance. And it was found that there is good correlation among them. Additionally, the micro-beam IR method sensitively detected modifications of amount of OH group for several kinds of treatment processes except for the NH 3 plasma treatment prior to Cu diffusion barrier dielectric deposition." @default.
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- W2024604186 date "2012-06-01" @default.
- W2024604186 modified "2023-09-23" @default.
- W2024604186 title "Inline Low-k damage detection of Cu/Low-k interconnect using micro beam IR method" @default.
- W2024604186 doi "https://doi.org/10.1109/iitc.2012.6251642" @default.
- W2024604186 hasPublicationYear "2012" @default.
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