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- W2024648851 abstract "The electron energy distribution function in CF4 gas discharge was numerically calculated for density reduced electric field E/N = 15 - 300 × 10−17 Vcm2 using the Boltzmann kinetic equation. The momentum transfer and vibrational cross-sections were derived from available experimental swarm parameters while the cross-sections for inelastic electron-molecule collisional processes included were taken from the literature. The two-term spherical harmonic expansion of the distribution function was used in the calculations." @default.
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- W2024648851 date "1987-01-01" @default.
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- W2024648851 title "Boltzmann Equation Analysis of the Electron Gas in CF4 Discharge Plasma" @default.
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