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- W2024649110 abstract "Abstract Experimental data on the temperature behavior of quartz crystal microbalances (QCMs) rigidly coated with solid polymer films of hexamethyldissiloxane (HMDSO) for gas and liquid-phase sensor applications are provided. 16 MHz AT-cut quartz resonators used as QCMs are coated at seven different HMDSO thicknesses in the 70–400 nm range by using a RF-plasma polymerization process. Their quasi cubic temperature frequency characteristics (TFCs) are measured over a temperature of −50 °C to 90 °C for each film thickness. A cubic spline approximation of the experimental data reveals a periodic oscillating behavior of the temperature coefficients of the TFC, while its inflection point oscillates between 24 °C and 28 °C in the above thickness range. Devices coated at 150, 260 and 380 nm, i.e. at a thickness period of 110–120 nm, were found to have identical thermal stability and TFC behavior. A simple practical method for correcting the sensor readings for thermally induced frequency shifts, based on an additional temperature measurement at each sensor reading, is suggested and verified experimentally." @default.
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- W2024649110 date "2015-09-01" @default.
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- W2024649110 title "Temperature behavior of solid polymer film coated quartz crystal microbalance for sensor applications" @default.
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- W2024649110 doi "https://doi.org/10.1016/j.snb.2015.04.034" @default.
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