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- W2024663172 abstract "Abstract The ultraviolet (UV) curable epoxy siloxane polymer is shown to cross-link at low UV dosages of 130 mJ/cm 2 , making it desirable for use in nanoimprinting and the rapid fabrication of micro/nano-scaled patterns. In this paper, the dielectric and mechanical properties of this UV-cured epoxy siloxane polymer are investigated. The results of these tests show that the rapid UV-cured polymer films have a dielectric constant of 2.7 ± 0.13, leakage current density on the order of 10 −9 A/cm 2 under 1 MV/cm, dielectric strength of greater than 5 MV/cm, and a reduced modulus of elasticity of 6.2 GPa characterized using nanoindentation. These properties indicate that the epoxy siloxane can be used to fabricate layers for functional device applications." @default.
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- W2024663172 date "2011-10-01" @default.
- W2024663172 modified "2023-09-26" @default.
- W2024663172 title "Rapid ultraviolet-curing of epoxy siloxane films" @default.
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- W2024663172 doi "https://doi.org/10.1016/j.matchemphys.2011.05.007" @default.
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