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W2024689819 abstract "Abstract We performed direct measurement of hydrogen content in diamond-like carbon (DLC) thin films using elastic recoil detection analysis (ERDA) of hydrogen atoms forward-scattered by a 2 keV beam of helium ions. DLC films were prepared in an electron cyclotron resonance (ECR) microwave plasma chemical vapor deposition (CVD) system. Use of a low-energy beam in conjunction with a small incidence angle allowed measurements of hydrogen content in the surface region of films of various thickness (2.4, 5 and 100 nm). Analysis of resultant spectra indicates that a higher negative substrate bias voltage produces lower hydrogen content; these findings are consistent with those obtained on thick DLC films using high-energy (2–3 MeV) ERDA. Accordingly, this confirms the suitability of using the low-energy ERDA system described to measure hydrogen content in ultrathin (" @default.
W2024689819 created "2016-06-24" @default.
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W2024689819 date "2000-04-01" @default.
W2024689819 modified "2023-09-27" @default.
W2024689819 title "Measurement of hydrogen content in ultrathin diamond-like carbon films using low-energy elastic recoil detection analysis" @default.
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W2024689819 doi "https://doi.org/10.1016/s0925-9635(99)00287-3" @default.
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