Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024690638> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2024690638 abstract "Abstract Using Si SiGe heteroepitaxy grown by solid-sources (SS) molecular beam epitaxy (MBE) on LOCOS-patterned wafers, an n-p-n Si/SiGe/Si heterojunction bipolar transistor (HBT) which is isolated by a polysilicon-filled trench has been fabricated. Unlike other SiGe HBTs using a metallic salicide process, in this proposed device a titanium disilicide (TiSi2) base electrode layer is formed by deposition and patterning of an amorphous TiSi2.x (x = 0–0.9) layer on the SiGe base layer using selective wet etching. In view of a lower thermal budget furnace annealing at 840°C has only been applied for the drive-in and activation of arsenic (As) implanted in the polysilicon-emitter. The Si/Si0.85Ge0.15/Si n-p-n HBT with a 1 × 4 μm2 mask size emitter typically shows a common-emitter current gain of 118, an Early voltage in the range of 150–170 V, a breakdown voltage BVceo of 7.8 V, a unity current gain frequency fT of 20 GHz, and a maximum oscillation frequency fmax of 15 GHz. Considering the theoretical limit of fT vs BVceo, the performance of our device is near the limit and demonstrates a potential for high frequency analog IC applications." @default.
- W2024690638 created "2016-06-24" @default.
- W2024690638 creator A5035776907 @default.
- W2024690638 creator A5071898339 @default.
- W2024690638 date "1996-11-01" @default.
- W2024690638 modified "2023-10-01" @default.
- W2024690638 title "MBE-grown SiGe base HBT with polysilicon-emitter and TiSi2 base ohmic layer" @default.
- W2024690638 cites W1989658658 @default.
- W2024690638 cites W2023162385 @default.
- W2024690638 cites W2031766550 @default.
- W2024690638 cites W2033064728 @default.
- W2024690638 cites W2035560556 @default.
- W2024690638 cites W2054307419 @default.
- W2024690638 cites W2069040393 @default.
- W2024690638 cites W2076558518 @default.
- W2024690638 cites W2140734432 @default.
- W2024690638 cites W2154594391 @default.
- W2024690638 doi "https://doi.org/10.1016/0038-1101(96)00087-1" @default.
- W2024690638 hasPublicationYear "1996" @default.
- W2024690638 type Work @default.
- W2024690638 sameAs 2024690638 @default.
- W2024690638 citedByCount "6" @default.
- W2024690638 crossrefType "journal-article" @default.
- W2024690638 hasAuthorship W2024690638A5035776907 @default.
- W2024690638 hasAuthorship W2024690638A5071898339 @default.
- W2024690638 hasConcept C110738630 @default.
- W2024690638 hasConcept C119599485 @default.
- W2024690638 hasConcept C127413603 @default.
- W2024690638 hasConcept C138230450 @default.
- W2024690638 hasConcept C165801399 @default.
- W2024690638 hasConcept C171250308 @default.
- W2024690638 hasConcept C172385210 @default.
- W2024690638 hasConcept C173408217 @default.
- W2024690638 hasConcept C192562407 @default.
- W2024690638 hasConcept C23061349 @default.
- W2024690638 hasConcept C2361726 @default.
- W2024690638 hasConcept C25356406 @default.
- W2024690638 hasConcept C2779227376 @default.
- W2024690638 hasConcept C3792809 @default.
- W2024690638 hasConcept C46918542 @default.
- W2024690638 hasConcept C49040817 @default.
- W2024690638 hasConcept C79794668 @default.
- W2024690638 hasConceptScore W2024690638C110738630 @default.
- W2024690638 hasConceptScore W2024690638C119599485 @default.
- W2024690638 hasConceptScore W2024690638C127413603 @default.
- W2024690638 hasConceptScore W2024690638C138230450 @default.
- W2024690638 hasConceptScore W2024690638C165801399 @default.
- W2024690638 hasConceptScore W2024690638C171250308 @default.
- W2024690638 hasConceptScore W2024690638C172385210 @default.
- W2024690638 hasConceptScore W2024690638C173408217 @default.
- W2024690638 hasConceptScore W2024690638C192562407 @default.
- W2024690638 hasConceptScore W2024690638C23061349 @default.
- W2024690638 hasConceptScore W2024690638C2361726 @default.
- W2024690638 hasConceptScore W2024690638C25356406 @default.
- W2024690638 hasConceptScore W2024690638C2779227376 @default.
- W2024690638 hasConceptScore W2024690638C3792809 @default.
- W2024690638 hasConceptScore W2024690638C46918542 @default.
- W2024690638 hasConceptScore W2024690638C49040817 @default.
- W2024690638 hasConceptScore W2024690638C79794668 @default.
- W2024690638 hasLocation W20246906381 @default.
- W2024690638 hasOpenAccess W2024690638 @default.
- W2024690638 hasPrimaryLocation W20246906381 @default.
- W2024690638 hasRelatedWork W1496479844 @default.
- W2024690638 hasRelatedWork W1569745250 @default.
- W2024690638 hasRelatedWork W1577664933 @default.
- W2024690638 hasRelatedWork W2034574118 @default.
- W2024690638 hasRelatedWork W2038205676 @default.
- W2024690638 hasRelatedWork W2079221224 @default.
- W2024690638 hasRelatedWork W2081721833 @default.
- W2024690638 hasRelatedWork W2122404949 @default.
- W2024690638 hasRelatedWork W2146395538 @default.
- W2024690638 hasRelatedWork W2379481380 @default.
- W2024690638 hasRelatedWork W2536307289 @default.
- W2024690638 hasRelatedWork W2536919057 @default.
- W2024690638 hasRelatedWork W2544734493 @default.
- W2024690638 hasRelatedWork W2574436323 @default.
- W2024690638 hasRelatedWork W2807195633 @default.
- W2024690638 hasRelatedWork W2122567624 @default.
- W2024690638 hasRelatedWork W2186509048 @default.
- W2024690638 hasRelatedWork W238183831 @default.
- W2024690638 hasRelatedWork W2602410235 @default.
- W2024690638 hasRelatedWork W2862379319 @default.
- W2024690638 isParatext "false" @default.
- W2024690638 isRetracted "false" @default.
- W2024690638 magId "2024690638" @default.
- W2024690638 workType "article" @default.