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- W2024704722 abstract "With design rules for integrated circuits attaining the_submicron range and current lithography techniques being pushed to their limits, the need for new lithography tools has become acute. A candidate for this is an X-ray stepper wilich provides high resolution with process latitude as well as high throughput. This paper will describe such a stepper." @default.
- W2024704722 created "2016-06-24" @default.
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- W2024704722 date "1987-06-30" @default.
- W2024704722 modified "2023-09-27" @default.
- W2024704722 title "An X-Ray Stepper For Production Lithography" @default.
- W2024704722 doi "https://doi.org/10.1117/12.940346" @default.
- W2024704722 hasPublicationYear "1987" @default.
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