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• W2024707364 endingPage "364202" @default.
• W2024707364 startingPage "364202" @default.
• W2024707364 abstract "The unique properties of CVD diamond make it a compelling choice for high power electronics. In order to achieve industrial use of CVD diamond, one must simultaneously obtain an excellent control of the film purity, very low defect content and a sufficiently rapid growth rate. Currently, only microwave plasma-assisted chemical vapour deposition (MPACVD) processes making use of resonant cavity systems provide enough atomic hydrogen to satisfy these requirements. We show in this paper that the use of high microwave power density (MWPD) plasmas is necessary to promote atomic hydrogen concentrations that are high enough to ensure the deposition of high purity diamond films at large growth rates. Moreover, the deposition of homogeneous films on large surfaces calls for the production of plasma with appropriate shapes and large volumes. The production of such plasmas needs generating a fairly high electric field over extended regions and requires a careful design of the MW coupling system, especially the cavity. As far as MW coupling efficiency is concerned, the presence of a plasma load represents a mismatching perturbation to the cavity. This perturbation is especially important at high MWPD where the reflected fraction of the input power may be quite high. This mismatch can lead to a pronounced heating of the reactor walls. It must therefore be taken into account from the very beginning of the reactor design. This requires the implementation of plasma modelling tools coupled to detailed electromagnetic simulations. This is discussed in section 3. We also briefly discuss the operating principles of the main commercial plasma reactors before introducing the reactor design methodology we have developed. Modelling results for a new generation of reactors developed at LIMHP, working at very high power density, will be presented. Lastly, we show that scaling up this type of reactor to lower frequencies (915 MHz) can result in high density plasmas allowing for fast and homogeneous diamond deposition on up to 160 mm diameter surfaces." @default.
• W2024707364 created "2016-06-24" @default.
• W2024707364 creator A5000492336 @default.
• W2024707364 creator A5056155860 @default.
• W2024707364 creator A5073725759 @default.
• W2024707364 creator A5077820043 @default.
• W2024707364 date "2009-08-19" @default.
• W2024707364 modified "2023-10-16" @default.
• W2024707364 title "Microwave engineering of plasma-assisted CVD reactors for diamond deposition" @default.
• W2024707364 cites W1665478371 @default.
• W2024707364 cites W1963524333 @default.
• W2024707364 cites W1971540314 @default.
• W2024707364 cites W1973316593 @default.
• W2024707364 cites W1984717486 @default.
• W2024707364 cites W1994320852 @default.
• W2024707364 cites W1994466903 @default.
• W2024707364 cites W2009539955 @default.
• W2024707364 cites W2015204361 @default.
• W2024707364 cites W2017136220 @default.
• W2024707364 cites W2019219061 @default.
• W2024707364 cites W2025117348 @default.
• W2024707364 cites W2055207477 @default.
• W2024707364 cites W2061187571 @default.
• W2024707364 cites W2072040273 @default.
• W2024707364 cites W2081580844 @default.
• W2024707364 cites W2083965462 @default.
• W2024707364 cites W2086275647 @default.
• W2024707364 cites W2136634940 @default.
• W2024707364 cites W2144644456 @default.
• W2024707364 doi "https://doi.org/10.1088/0953-8984/21/36/364202" @default.
• W2024707364 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/21832308" @default.
• W2024707364 hasPublicationYear "2009" @default.
• W2024707364 type Work @default.
• W2024707364 sameAs 2024707364 @default.
• W2024707364 citedByCount "83" @default.
• W2024707364 countsByYear W20247073642012 @default.
• W2024707364 countsByYear W20247073642013 @default.
• W2024707364 countsByYear W20247073642014 @default.
• W2024707364 countsByYear W20247073642015 @default.
• W2024707364 countsByYear W20247073642016 @default.
• W2024707364 countsByYear W20247073642017 @default.
• W2024707364 countsByYear W20247073642018 @default.
• W2024707364 countsByYear W20247073642019 @default.
• W2024707364 countsByYear W20247073642020 @default.
• W2024707364 countsByYear W20247073642021 @default.
• W2024707364 countsByYear W20247073642022 @default.
• W2024707364 countsByYear W20247073642023 @default.
• W2024707364 crossrefType "journal-article" @default.
• W2024707364 hasAuthorship W2024707364A5000492336 @default.
• W2024707364 hasAuthorship W2024707364A5056155860 @default.
• W2024707364 hasAuthorship W2024707364A5073725759 @default.
• W2024707364 hasAuthorship W2024707364A5077820043 @default.
• W2024707364 hasConcept C116915560 @default.
• W2024707364 hasConcept C121332964 @default.
• W2024707364 hasConcept C127413603 @default.
• W2024707364 hasConcept C151730666 @default.
• W2024707364 hasConcept C159985019 @default.
• W2024707364 hasConcept C178790620 @default.
• W2024707364 hasConcept C184779094 @default.
• W2024707364 hasConcept C185592680 @default.
• W2024707364 hasConcept C186397771 @default.
• W2024707364 hasConcept C192562407 @default.
• W2024707364 hasConcept C2776921476 @default.
• W2024707364 hasConcept C2816523 @default.
• W2024707364 hasConcept C41008148 @default.
• W2024707364 hasConcept C44838205 @default.
• W2024707364 hasConcept C49040817 @default.
• W2024707364 hasConcept C512968161 @default.
• W2024707364 hasConcept C57410435 @default.
• W2024707364 hasConcept C61696701 @default.
• W2024707364 hasConcept C62520636 @default.
• W2024707364 hasConcept C64297162 @default.
• W2024707364 hasConcept C76155785 @default.
• W2024707364 hasConcept C82706917 @default.
• W2024707364 hasConcept C86803240 @default.
• W2024707364 hasConceptScore W2024707364C116915560 @default.
• W2024707364 hasConceptScore W2024707364C121332964 @default.
• W2024707364 hasConceptScore W2024707364C127413603 @default.
• W2024707364 hasConceptScore W2024707364C151730666 @default.
• W2024707364 hasConceptScore W2024707364C159985019 @default.
• W2024707364 hasConceptScore W2024707364C178790620 @default.
• W2024707364 hasConceptScore W2024707364C184779094 @default.
• W2024707364 hasConceptScore W2024707364C185592680 @default.
• W2024707364 hasConceptScore W2024707364C186397771 @default.
• W2024707364 hasConceptScore W2024707364C192562407 @default.
• W2024707364 hasConceptScore W2024707364C2776921476 @default.
• W2024707364 hasConceptScore W2024707364C2816523 @default.
• W2024707364 hasConceptScore W2024707364C41008148 @default.
• W2024707364 hasConceptScore W2024707364C44838205 @default.
• W2024707364 hasConceptScore W2024707364C49040817 @default.
• W2024707364 hasConceptScore W2024707364C512968161 @default.
• W2024707364 hasConceptScore W2024707364C57410435 @default.
• W2024707364 hasConceptScore W2024707364C61696701 @default.
• W2024707364 hasConceptScore W2024707364C62520636 @default.
• W2024707364 hasConceptScore W2024707364C64297162 @default.
• W2024707364 hasConceptScore W2024707364C76155785 @default.
• W2024707364 hasConceptScore W2024707364C82706917 @default.
• W2024707364 hasConceptScore W2024707364C86803240 @default.

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