Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024713901> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2024713901 endingPage "2419" @default.
- W2024713901 startingPage "2412" @default.
- W2024713901 abstract "Laser thermal processing (LTP) has been proposed as a means to avoid unwanted transient enhanced diffusion and deactivation of dopants, especially boron and arsenic, during the formation of ultrashallow junctions. Although experimental studies have been carried out to determine the efficacy of LTP for pure Si and lightly B-doped junctions, the effects of high concentrations of dopants (above 2% B) on the thermodynamic and kinetic properties of the regrown film are unknown. In this study, a classical interatomic potential model [Stillinger–Weber (SW)] is used with a nonequilibrium molecular dynamics computer simulation technique to study the laser thermal processing of heavily B-doped Si in the range 2–10 at. % B. We observe only a small effect of boron concentration on the congruent melting temperature of the B:Si alloy, and thus the narrowing of the “process window” for LTP is predicted to be small. No significant tendency for boron to segregate was observed at either the regrowth front or the buried c-Si interface during fast regrowth. The B-doped region regrew as defect-free crystal with full activation of the boron atoms at low boron concentrations (2%), in good agreement with experiments. As the concentration of boron increased, the number of intrinsic Si defects and boron interstitials in the regrown materials increased, with a minor amount of boron atoms in clusters (<2%). An instability limit for crystal regrowth was observed at around 8%–10% boron atoms during fast regrowth; systems with 10% B showed partial amorphization during regrowth. Comparison with tight-binding quantum mechanical calculations showed that the SW model gives similar diffusivities in the liquid and tendency to cluster, but the lifetimes of the SW clusters are considerably too long (>150 ps, compared to 5 ps in tight binding). The importance of adequate system size is discussed." @default.
- W2024713901 created "2016-06-24" @default.
- W2024713901 creator A5018184772 @default.
- W2024713901 creator A5030108914 @default.
- W2024713901 creator A5030863265 @default.
- W2024713901 creator A5076991557 @default.
- W2024713901 date "2002-08-16" @default.
- W2024713901 modified "2023-10-12" @default.
- W2024713901 title "Thermodynamic and kinetic studies of laser thermal processing of heavily boron-doped amorphous silicon using molecular dynamics" @default.
- W2024713901 cites W1963834056 @default.
- W2024713901 cites W1976411957 @default.
- W2024713901 cites W1977092232 @default.
- W2024713901 cites W1987700216 @default.
- W2024713901 cites W2001899268 @default.
- W2024713901 cites W2007553441 @default.
- W2024713901 cites W2027333352 @default.
- W2024713901 cites W2029690644 @default.
- W2024713901 cites W2032551921 @default.
- W2024713901 cites W2034771650 @default.
- W2024713901 cites W2037782625 @default.
- W2024713901 cites W2038557896 @default.
- W2024713901 cites W2043536195 @default.
- W2024713901 cites W2061094465 @default.
- W2024713901 cites W2064489628 @default.
- W2024713901 cites W2067377316 @default.
- W2024713901 cites W2072298802 @default.
- W2024713901 cites W2078402226 @default.
- W2024713901 cites W2078678909 @default.
- W2024713901 cites W2082567633 @default.
- W2024713901 cites W2083549953 @default.
- W2024713901 cites W2089444113 @default.
- W2024713901 cites W2093445382 @default.
- W2024713901 cites W2096051337 @default.
- W2024713901 cites W2148280918 @default.
- W2024713901 cites W2151258929 @default.
- W2024713901 cites W2153668619 @default.
- W2024713901 cites W4235510693 @default.
- W2024713901 doi "https://doi.org/10.1063/1.1497459" @default.
- W2024713901 hasPublicationYear "2002" @default.
- W2024713901 type Work @default.
- W2024713901 sameAs 2024713901 @default.
- W2024713901 citedByCount "17" @default.
- W2024713901 countsByYear W20247139012012 @default.
- W2024713901 countsByYear W20247139012018 @default.
- W2024713901 countsByYear W20247139012020 @default.
- W2024713901 countsByYear W20247139012021 @default.
- W2024713901 crossrefType "journal-article" @default.
- W2024713901 hasAuthorship W2024713901A5018184772 @default.
- W2024713901 hasAuthorship W2024713901A5030108914 @default.
- W2024713901 hasAuthorship W2024713901A5030863265 @default.
- W2024713901 hasAuthorship W2024713901A5076991557 @default.
- W2024713901 hasConcept C113196181 @default.
- W2024713901 hasConcept C159467904 @default.
- W2024713901 hasConcept C178790620 @default.
- W2024713901 hasConcept C185592680 @default.
- W2024713901 hasConcept C191952053 @default.
- W2024713901 hasConcept C192562407 @default.
- W2024713901 hasConcept C43617362 @default.
- W2024713901 hasConcept C49040817 @default.
- W2024713901 hasConcept C501308230 @default.
- W2024713901 hasConcept C544956773 @default.
- W2024713901 hasConcept C56052488 @default.
- W2024713901 hasConcept C57863236 @default.
- W2024713901 hasConcept C8010536 @default.
- W2024713901 hasConceptScore W2024713901C113196181 @default.
- W2024713901 hasConceptScore W2024713901C159467904 @default.
- W2024713901 hasConceptScore W2024713901C178790620 @default.
- W2024713901 hasConceptScore W2024713901C185592680 @default.
- W2024713901 hasConceptScore W2024713901C191952053 @default.
- W2024713901 hasConceptScore W2024713901C192562407 @default.
- W2024713901 hasConceptScore W2024713901C43617362 @default.
- W2024713901 hasConceptScore W2024713901C49040817 @default.
- W2024713901 hasConceptScore W2024713901C501308230 @default.
- W2024713901 hasConceptScore W2024713901C544956773 @default.
- W2024713901 hasConceptScore W2024713901C56052488 @default.
- W2024713901 hasConceptScore W2024713901C57863236 @default.
- W2024713901 hasConceptScore W2024713901C8010536 @default.
- W2024713901 hasIssue "5" @default.
- W2024713901 hasLocation W20247139011 @default.
- W2024713901 hasOpenAccess W2024713901 @default.
- W2024713901 hasPrimaryLocation W20247139011 @default.
- W2024713901 hasRelatedWork W1966205888 @default.
- W2024713901 hasRelatedWork W1978060492 @default.
- W2024713901 hasRelatedWork W2001541608 @default.
- W2024713901 hasRelatedWork W2013862278 @default.
- W2024713901 hasRelatedWork W2033669323 @default.
- W2024713901 hasRelatedWork W2064745610 @default.
- W2024713901 hasRelatedWork W2092524599 @default.
- W2024713901 hasRelatedWork W2121493818 @default.
- W2024713901 hasRelatedWork W2151646556 @default.
- W2024713901 hasRelatedWork W2757294858 @default.
- W2024713901 hasVolume "92" @default.
- W2024713901 isParatext "false" @default.
- W2024713901 isRetracted "false" @default.
- W2024713901 magId "2024713901" @default.
- W2024713901 workType "article" @default.