FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024763544> ?p ?o ?g. }

• W2024763544 abstract "The deposition flux obtained during reactive radio frequency magnetron sputtering of an Al target in Ar∕O2 gas mixtures was studied by mass spectrometry. The results show significant amounts of molecular AlO+ (up to 10% of the Al+ flux) in the ionic flux incident onto the substrate. In the presence of ∼10−4Pa H2O additional OH+ and AlOH+ were detected, amounting to up to about 100% and 30% of the Al+ flux, respectively. Since the ions represent a small fraction of the total deposition flux, an estimation of the neutral content was also made. These calculations show that, due to the higher ionization probability of Al, the amount of neutral AlO in the deposition flux is of the order of, or even higher than, the amount of Al. These findings might be of great aid when explaining the alumina thin film growth process." @default.
• W2024763544 created "2016-06-24" @default.
• W2024763544 creator A5009092175 @default.
• W2024763544 creator A5034910199 @default.
• W2024763544 creator A5043991695 @default.
• W2024763544 creator A5064050011 @default.
• W2024763544 date "2006-01-30" @default.
• W2024763544 modified "2023-10-16" @default.
• W2024763544 title "Molecular content of the deposition flux during reactive Ar∕O2 magnetron sputtering of Al" @default.
• W2024763544 cites W1495406873 @default.
• W2024763544 cites W1549147629 @default.
• W2024763544 cites W1980929018 @default.
• W2024763544 cites W1981747440 @default.
• W2024763544 cites W1986983573 @default.
• W2024763544 cites W1997775718 @default.
• W2024763544 cites W2001065550 @default.
• W2024763544 cites W2001806768 @default.
• W2024763544 cites W2005993996 @default.
• W2024763544 cites W2010948761 @default.
• W2024763544 cites W2021016421 @default.
• W2024763544 cites W2022351400 @default.
• W2024763544 cites W2026541275 @default.
• W2024763544 cites W2035332527 @default.
• W2024763544 cites W2049609214 @default.
• W2024763544 cites W2065431565 @default.
• W2024763544 cites W2082117541 @default.
• W2024763544 cites W2083899684 @default.
• W2024763544 cites W2089574281 @default.
• W2024763544 cites W2102970728 @default.
• W2024763544 cites W2132883700 @default.
• W2024763544 doi "https://doi.org/10.1063/1.2170404" @default.
• W2024763544 hasPublicationYear "2006" @default.
• W2024763544 type Work @default.
• W2024763544 sameAs 2024763544 @default.
• W2024763544 citedByCount "10" @default.
• W2024763544 countsByYear W20247635442014 @default.
• W2024763544 countsByYear W20247635442019 @default.
• W2024763544 countsByYear W20247635442020 @default.
• W2024763544 crossrefType "journal-article" @default.
• W2024763544 hasAuthorship W2024763544A5009092175 @default.
• W2024763544 hasAuthorship W2024763544A5034910199 @default.
• W2024763544 hasAuthorship W2024763544A5043991695 @default.
• W2024763544 hasAuthorship W2024763544A5064050011 @default.
• W2024763544 hasBestOaLocation W20247635442 @default.
• W2024763544 hasConcept C107872376 @default.
• W2024763544 hasConcept C111368507 @default.
• W2024763544 hasConcept C113196181 @default.
• W2024763544 hasConcept C123408415 @default.
• W2024763544 hasConcept C127313418 @default.
• W2024763544 hasConcept C145148216 @default.
• W2024763544 hasConcept C151730666 @default.
• W2024763544 hasConcept C162356407 @default.
• W2024763544 hasConcept C171250308 @default.
• W2024763544 hasConcept C178790620 @default.
• W2024763544 hasConcept C185592680 @default.
• W2024763544 hasConcept C19067145 @default.
• W2024763544 hasConcept C192562407 @default.
• W2024763544 hasConcept C198291218 @default.
• W2024763544 hasConcept C2182769 @default.
• W2024763544 hasConcept C22423302 @default.
• W2024763544 hasConcept C2777289219 @default.
• W2024763544 hasConcept C2816523 @default.
• W2024763544 hasConcept C43617362 @default.
• W2024763544 hasConcept C51576277 @default.
• W2024763544 hasConcept C61427134 @default.
• W2024763544 hasConcept C64297162 @default.
• W2024763544 hasConcept C68709404 @default.
• W2024763544 hasConcept C86803240 @default.
• W2024763544 hasConceptScore W2024763544C107872376 @default.
• W2024763544 hasConceptScore W2024763544C111368507 @default.
• W2024763544 hasConceptScore W2024763544C113196181 @default.
• W2024763544 hasConceptScore W2024763544C123408415 @default.
• W2024763544 hasConceptScore W2024763544C127313418 @default.
• W2024763544 hasConceptScore W2024763544C145148216 @default.
• W2024763544 hasConceptScore W2024763544C151730666 @default.
• W2024763544 hasConceptScore W2024763544C162356407 @default.
• W2024763544 hasConceptScore W2024763544C171250308 @default.
• W2024763544 hasConceptScore W2024763544C178790620 @default.
• W2024763544 hasConceptScore W2024763544C185592680 @default.
• W2024763544 hasConceptScore W2024763544C19067145 @default.
• W2024763544 hasConceptScore W2024763544C192562407 @default.
• W2024763544 hasConceptScore W2024763544C198291218 @default.
• W2024763544 hasConceptScore W2024763544C2182769 @default.
• W2024763544 hasConceptScore W2024763544C22423302 @default.
• W2024763544 hasConceptScore W2024763544C2777289219 @default.
• W2024763544 hasConceptScore W2024763544C2816523 @default.
• W2024763544 hasConceptScore W2024763544C43617362 @default.
• W2024763544 hasConceptScore W2024763544C51576277 @default.
• W2024763544 hasConceptScore W2024763544C61427134 @default.
• W2024763544 hasConceptScore W2024763544C64297162 @default.
• W2024763544 hasConceptScore W2024763544C68709404 @default.
• W2024763544 hasConceptScore W2024763544C86803240 @default.
• W2024763544 hasIssue "5" @default.
• W2024763544 hasLocation W20247635441 @default.
• W2024763544 hasLocation W20247635442 @default.
• W2024763544 hasOpenAccess W2024763544 @default.
• W2024763544 hasPrimaryLocation W20247635441 @default.
• W2024763544 hasRelatedWork W1968373997 @default.
• W2024763544 hasRelatedWork W2019423004 @default.
• W2024763544 hasRelatedWork W2024763544 @default.

• next