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- W2024787034 abstract "We report on a methodology for simultaneous determination of the Young's modulus and density of ultrathin films from a resonance experiment. The approach is based on an interferrometric detection of the in-plane and out-of-plane resonant responses of an optically excited single crystal Si nano cantilever prior and after Atomic Layer Deposition (ALD) of a thin film. The frequencies shifts were measured at the same structure reducing sensitivity to scattering in geometric parameters and clamping compliances. Experimental results obtained for Al 2 O 3 (alumina) and HfO 2 (hafnia) were consistent with the model predictions and the data available in literature." @default.
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- W2024787034 date "2009-01-01" @default.
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- W2024787034 title "Determination of Density and Young's Modulus of Atomic Layer Deposited Thin Films by Resonant Frequency Measurements of Optically Excited Nanocantilevers" @default.
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- W2024787034 doi "https://doi.org/10.1109/memsys.2009.4805466" @default.
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