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- W2024856827 abstract "Summary form only given. Electron behavior in an electron cyclotron resonance microwave discharge maintained by the TM/sub 01/ mode fields of a cylindrical waveguide has been investigated via a Monte Carlo simulation. Since this discharge has a high degree of ionization (> 1%), a self-consistent simulation of the plasma dynamics is performed using the ponderomotive and Grad-B (-/spl muspl utrisub /spl parB) forces. Accumulation of negative charges on the boundary surface sets up a sheath whose influence is also taken into account. The time averaged, spatially dependent electron energy distribution is computed self-consistently by integrating electron trajectories subject to microwave fields, the divergent background magnetic field, the space charge field, and the sheath field, taking into account electron-electron collisions and collisions with the neutral hydrogen atoms. At low pressures (approximately 0.5 mTorr), the sheath potential is the order of 100 V and decreases with increasing pressure. This observation suggests a pressure range for operation of reactors for diamond-like carbon film deposition." @default.
- W2024856827 created "2016-06-24" @default.
- W2024856827 creator A5018631303 @default.
- W2024856827 creator A5028479484 @default.
- W2024856827 creator A5075287674 @default.
- W2024856827 date "1993-01-01" @default.
- W2024856827 modified "2023-09-23" @default.
- W2024856827 title "Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge" @default.
- W2024856827 cites W1972795511 @default.
- W2024856827 doi "https://doi.org/10.1109/plasma.1993.593406" @default.
- W2024856827 hasPublicationYear "1993" @default.
- W2024856827 type Work @default.
- W2024856827 sameAs 2024856827 @default.
- W2024856827 citedByCount "0" @default.
- W2024856827 crossrefType "proceedings-article" @default.
- W2024856827 hasAuthorship W2024856827A5018631303 @default.
- W2024856827 hasAuthorship W2024856827A5028479484 @default.
- W2024856827 hasAuthorship W2024856827A5075287674 @default.
- W2024856827 hasConcept C105795698 @default.
- W2024856827 hasConcept C121332964 @default.
- W2024856827 hasConcept C132427895 @default.
- W2024856827 hasConcept C145148216 @default.
- W2024856827 hasConcept C147120987 @default.
- W2024856827 hasConcept C175361016 @default.
- W2024856827 hasConcept C184779094 @default.
- W2024856827 hasConcept C192562407 @default.
- W2024856827 hasConcept C19499675 @default.
- W2024856827 hasConcept C198291218 @default.
- W2024856827 hasConcept C33923547 @default.
- W2024856827 hasConcept C39527238 @default.
- W2024856827 hasConcept C44838205 @default.
- W2024856827 hasConcept C62520636 @default.
- W2024856827 hasConceptScore W2024856827C105795698 @default.
- W2024856827 hasConceptScore W2024856827C121332964 @default.
- W2024856827 hasConceptScore W2024856827C132427895 @default.
- W2024856827 hasConceptScore W2024856827C145148216 @default.
- W2024856827 hasConceptScore W2024856827C147120987 @default.
- W2024856827 hasConceptScore W2024856827C175361016 @default.
- W2024856827 hasConceptScore W2024856827C184779094 @default.
- W2024856827 hasConceptScore W2024856827C192562407 @default.
- W2024856827 hasConceptScore W2024856827C19499675 @default.
- W2024856827 hasConceptScore W2024856827C198291218 @default.
- W2024856827 hasConceptScore W2024856827C33923547 @default.
- W2024856827 hasConceptScore W2024856827C39527238 @default.
- W2024856827 hasConceptScore W2024856827C44838205 @default.
- W2024856827 hasConceptScore W2024856827C62520636 @default.
- W2024856827 hasLocation W20248568271 @default.
- W2024856827 hasOpenAccess W2024856827 @default.
- W2024856827 hasPrimaryLocation W20248568271 @default.
- W2024856827 hasRelatedWork W1992135959 @default.
- W2024856827 hasRelatedWork W1992518106 @default.
- W2024856827 hasRelatedWork W1999770920 @default.
- W2024856827 hasRelatedWork W2001505804 @default.
- W2024856827 hasRelatedWork W2015524782 @default.
- W2024856827 hasRelatedWork W2024702830 @default.
- W2024856827 hasRelatedWork W2030311907 @default.
- W2024856827 hasRelatedWork W2031888910 @default.
- W2024856827 hasRelatedWork W2043450548 @default.
- W2024856827 hasRelatedWork W2053086447 @default.
- W2024856827 hasRelatedWork W2058396850 @default.
- W2024856827 hasRelatedWork W2066621748 @default.
- W2024856827 hasRelatedWork W2082719740 @default.
- W2024856827 hasRelatedWork W2092874081 @default.
- W2024856827 hasRelatedWork W2097334405 @default.
- W2024856827 hasRelatedWork W2359891095 @default.
- W2024856827 hasRelatedWork W2370551129 @default.
- W2024856827 hasRelatedWork W2752934890 @default.
- W2024856827 hasRelatedWork W3092591687 @default.
- W2024856827 hasRelatedWork W3106482529 @default.
- W2024856827 isParatext "false" @default.
- W2024856827 isRetracted "false" @default.
- W2024856827 magId "2024856827" @default.
- W2024856827 workType "article" @default.