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• W2024861134 endingPage "7726" @default.
• W2024861134 startingPage "7723" @default.
• W2024861134 abstract "Hysteresis-free hafnium oxide films were fabricated by atomic layer deposition at 90 °C without any post-deposition annealing, and their structures and properties were compared with films deposited at 150 °C and 250 °C. The refractivity, bandgap, dielectric constant and leakage current density all increase with deposition temperature, while the growth rate and breakdown field decrease. All films are amorphous with roughly the same composition. Although the thin films deposited at the above-mentioned temperatures all show negligible hysteresis, only the 90 °C-deposited films remain hysteresis-free when the film thickness increases. The 90 °C-deposited films remain hysteresis-free after annealing at 300 °C. The hysteresis in films deposited at high temperatures increases with deposition temperature. Evidences show such hysteresis originates in the HfO2 film instead of the interface. Based on a careful structure analysis, middle-range order is suggested to influence the trap density in the films. HfO2 films deposited at low temperature with negligible hysteresis and excellent electrical properties have great potential for the fabrication and integration of devices based on non-silicon channel materials and in applications as tunneling and blocking layers in memory devices." @default.
• W2024861134 created "2016-06-24" @default.
• W2024861134 creator A5014979782 @default.
• W2024861134 creator A5031901026 @default.
• W2024861134 creator A5033112541 @default.
• W2024861134 creator A5055796802 @default.
• W2024861134 creator A5056103420 @default.
• W2024861134 creator A5057276138 @default.
• W2024861134 creator A5078032049 @default.
• W2024861134 date "2011-09-01" @default.
• W2024861134 modified "2023-10-16" @default.
• W2024861134 title "Hysteresis-free HfO2 film grown by atomic layer deposition at low temperature" @default.
• W2024861134 cites W1509867469 @default.
• W2024861134 cites W1646998796 @default.
• W2024861134 cites W1967588736 @default.
• W2024861134 cites W1968466524 @default.
• W2024861134 cites W1981578939 @default.
• W2024861134 cites W1997094062 @default.
• W2024861134 cites W2002378959 @default.
• W2024861134 cites W2002738781 @default.
• W2024861134 cites W2010202518 @default.
• W2024861134 cites W2018747769 @default.
• W2024861134 cites W2019592005 @default.
• W2024861134 cites W2029727758 @default.
• W2024861134 cites W2035848421 @default.
• W2024861134 cites W2041246757 @default.
• W2024861134 cites W2049142984 @default.
• W2024861134 cites W2051867550 @default.
• W2024861134 cites W2053674573 @default.
• W2024861134 cites W2057119784 @default.
• W2024861134 cites W2066649429 @default.
• W2024861134 cites W2067425187 @default.
• W2024861134 cites W2091739606 @default.
• W2024861134 cites W2134511326 @default.
• W2024861134 cites W2147131024 @default.
• W2024861134 cites W2159550272 @default.
• W2024861134 cites W2169933013 @default.
• W2024861134 cites W3098718223 @default.
• W2024861134 doi "https://doi.org/10.1016/j.tsf.2011.05.065" @default.
• W2024861134 hasPublicationYear "2011" @default.
• W2024861134 type Work @default.
• W2024861134 sameAs 2024861134 @default.
• W2024861134 citedByCount "5" @default.
• W2024861134 countsByYear W20248611342015 @default.
• W2024861134 countsByYear W20248611342016 @default.
• W2024861134 countsByYear W20248611342019 @default.
• W2024861134 countsByYear W20248611342021 @default.
• W2024861134 crossrefType "journal-article" @default.
• W2024861134 hasAuthorship W2024861134A5014979782 @default.
• W2024861134 hasAuthorship W2024861134A5031901026 @default.
• W2024861134 hasAuthorship W2024861134A5033112541 @default.
• W2024861134 hasAuthorship W2024861134A5055796802 @default.
• W2024861134 hasAuthorship W2024861134A5056103420 @default.
• W2024861134 hasAuthorship W2024861134A5057276138 @default.
• W2024861134 hasAuthorship W2024861134A5078032049 @default.
• W2024861134 hasConcept C121332964 @default.
• W2024861134 hasConcept C123299182 @default.
• W2024861134 hasConcept C133386390 @default.
• W2024861134 hasConcept C136525101 @default.
• W2024861134 hasConcept C142724271 @default.
• W2024861134 hasConcept C151730666 @default.
• W2024861134 hasConcept C153294291 @default.
• W2024861134 hasConcept C159985019 @default.
• W2024861134 hasConcept C171250308 @default.
• W2024861134 hasConcept C181966813 @default.
• W2024861134 hasConcept C185592680 @default.
• W2024861134 hasConcept C19067145 @default.
• W2024861134 hasConcept C192562407 @default.
• W2024861134 hasConcept C204787440 @default.
• W2024861134 hasConcept C26873012 @default.
• W2024861134 hasConcept C2777855556 @default.
• W2024861134 hasConcept C2816523 @default.
• W2024861134 hasConcept C39353612 @default.
• W2024861134 hasConcept C49040817 @default.
• W2024861134 hasConcept C56052488 @default.
• W2024861134 hasConcept C64297162 @default.
• W2024861134 hasConcept C69544855 @default.
• W2024861134 hasConcept C71924100 @default.
• W2024861134 hasConcept C8010536 @default.
• W2024861134 hasConcept C86803240 @default.
• W2024861134 hasConceptScore W2024861134C121332964 @default.
• W2024861134 hasConceptScore W2024861134C123299182 @default.
• W2024861134 hasConceptScore W2024861134C133386390 @default.
• W2024861134 hasConceptScore W2024861134C136525101 @default.
• W2024861134 hasConceptScore W2024861134C142724271 @default.
• W2024861134 hasConceptScore W2024861134C151730666 @default.
• W2024861134 hasConceptScore W2024861134C153294291 @default.
• W2024861134 hasConceptScore W2024861134C159985019 @default.
• W2024861134 hasConceptScore W2024861134C171250308 @default.
• W2024861134 hasConceptScore W2024861134C181966813 @default.
• W2024861134 hasConceptScore W2024861134C185592680 @default.
• W2024861134 hasConceptScore W2024861134C19067145 @default.
• W2024861134 hasConceptScore W2024861134C192562407 @default.
• W2024861134 hasConceptScore W2024861134C204787440 @default.
• W2024861134 hasConceptScore W2024861134C26873012 @default.
• W2024861134 hasConceptScore W2024861134C2777855556 @default.
• W2024861134 hasConceptScore W2024861134C2816523 @default.
• W2024861134 hasConceptScore W2024861134C39353612 @default.

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