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• W2024867939 endingPage "035021" @default.
• W2024867939 startingPage "035021" @default.
• W2024867939 abstract "In this study, the effect on thin film growth due to an anomalous electron transport, found in high power impulse magnetron sputtering (HiPIMS), has been investigated for the case of a planar circular magnetron. An important consequence of this type of transport is that it affects the way ions are being transported in the plasma. It was found that a significant fraction of ions are transported radially outwards in the vicinity of the cathode, across the magnetic field lines, leading to increased deposition rates directly at the side of the cathode (perpendicular to the target surface). Furthermore, this mass transport parallel to the target surface leads to that the fraction of sputtered material reaching a substrate placed directly in front of the target is substantially lower in HiPIMS compared with conventional direct current magnetron sputtering (dcMS). This would help to explain the lower deposition rates generally observed for HiPIMS compared with dcMS. Moreover, time-averaged mass spectrometry measurements of the energy distribution of the cross-field transported ions were carried out. The measured distributions show a direction-dependent high-energy tail, in agreement with predictions of the anomalous transport mechanism." @default.
• W2024867939 created "2016-06-24" @default.
• W2024867939 creator A5011397812 @default.
• W2024867939 creator A5016682524 @default.
• W2024867939 creator A5025479661 @default.
• W2024867939 creator A5034910199 @default.
• W2024867939 creator A5035530969 @default.
• W2024867939 creator A5064050011 @default.
• W2024867939 date "2008-07-07" @default.
• W2024867939 modified "2023-10-18" @default.
• W2024867939 title "Cross-field ion transport during high power impulse magnetron sputtering" @default.
• W2024867939 cites W1784681197 @default.
• W2024867939 cites W1980899127 @default.
• W2024867939 cites W1980931040 @default.
• W2024867939 cites W2003044025 @default.
• W2024867939 cites W2004982340 @default.
• W2024867939 cites W2009655625 @default.
• W2024867939 cites W2012761187 @default.
• W2024867939 cites W2015921575 @default.
• W2024867939 cites W2025801567 @default.
• W2024867939 cites W2026142059 @default.
• W2024867939 cites W2030999196 @default.
• W2024867939 cites W2032275606 @default.
• W2024867939 cites W2040544796 @default.
• W2024867939 cites W2042414791 @default.
• W2024867939 cites W2051944828 @default.
• W2024867939 cites W2054310995 @default.
• W2024867939 cites W2056553648 @default.
• W2024867939 cites W2059288413 @default.
• W2024867939 cites W2060573780 @default.
• W2024867939 cites W2084210225 @default.
• W2024867939 cites W2087655813 @default.
• W2024867939 cites W2105148630 @default.
• W2024867939 cites W2109389237 @default.
• W2024867939 cites W2161508873 @default.
• W2024867939 doi "https://doi.org/10.1088/0963-0252/17/3/035021" @default.
• W2024867939 hasPublicationYear "2008" @default.
• W2024867939 type Work @default.
• W2024867939 sameAs 2024867939 @default.
• W2024867939 citedByCount "108" @default.
• W2024867939 countsByYear W20248679392012 @default.
• W2024867939 countsByYear W20248679392013 @default.
• W2024867939 countsByYear W20248679392014 @default.
• W2024867939 countsByYear W20248679392015 @default.
• W2024867939 countsByYear W20248679392016 @default.
• W2024867939 countsByYear W20248679392017 @default.
• W2024867939 countsByYear W20248679392018 @default.
• W2024867939 countsByYear W20248679392019 @default.
• W2024867939 countsByYear W20248679392020 @default.
• W2024867939 countsByYear W20248679392021 @default.
• W2024867939 countsByYear W20248679392022 @default.
• W2024867939 countsByYear W20248679392023 @default.
• W2024867939 crossrefType "journal-article" @default.
• W2024867939 hasAuthorship W2024867939A5011397812 @default.
• W2024867939 hasAuthorship W2024867939A5016682524 @default.
• W2024867939 hasAuthorship W2024867939A5025479661 @default.
• W2024867939 hasAuthorship W2024867939A5034910199 @default.
• W2024867939 hasAuthorship W2024867939A5035530969 @default.
• W2024867939 hasAuthorship W2024867939A5064050011 @default.
• W2024867939 hasBestOaLocation W20248679392 @default.
• W2024867939 hasConcept C121332964 @default.
• W2024867939 hasConcept C123408415 @default.
• W2024867939 hasConcept C145148216 @default.
• W2024867939 hasConcept C163258240 @default.
• W2024867939 hasConcept C171250308 @default.
• W2024867939 hasConcept C184779094 @default.
• W2024867939 hasConcept C19067145 @default.
• W2024867939 hasConcept C192562407 @default.
• W2024867939 hasConcept C202444582 @default.
• W2024867939 hasConcept C22423302 @default.
• W2024867939 hasConcept C33923547 @default.
• W2024867939 hasConcept C61427134 @default.
• W2024867939 hasConcept C62520636 @default.
• W2024867939 hasConcept C70836080 @default.
• W2024867939 hasConcept C74650414 @default.
• W2024867939 hasConcept C9652623 @default.
• W2024867939 hasConcept C97355855 @default.
• W2024867939 hasConcept C97892325 @default.
• W2024867939 hasConceptScore W2024867939C121332964 @default.
• W2024867939 hasConceptScore W2024867939C123408415 @default.
• W2024867939 hasConceptScore W2024867939C145148216 @default.
• W2024867939 hasConceptScore W2024867939C163258240 @default.
• W2024867939 hasConceptScore W2024867939C171250308 @default.
• W2024867939 hasConceptScore W2024867939C184779094 @default.
• W2024867939 hasConceptScore W2024867939C19067145 @default.
• W2024867939 hasConceptScore W2024867939C192562407 @default.
• W2024867939 hasConceptScore W2024867939C202444582 @default.
• W2024867939 hasConceptScore W2024867939C22423302 @default.
• W2024867939 hasConceptScore W2024867939C33923547 @default.
• W2024867939 hasConceptScore W2024867939C61427134 @default.
• W2024867939 hasConceptScore W2024867939C62520636 @default.
• W2024867939 hasConceptScore W2024867939C70836080 @default.
• W2024867939 hasConceptScore W2024867939C74650414 @default.
• W2024867939 hasConceptScore W2024867939C9652623 @default.
• W2024867939 hasConceptScore W2024867939C97355855 @default.
• W2024867939 hasConceptScore W2024867939C97892325 @default.
• W2024867939 hasIssue "3" @default.
• W2024867939 hasLocation W20248679391 @default.

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