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- W2024869968 abstract "Thermal wave measurements on 6H-SiC with a particular emphasis on Al<SUP>+</SUP> and Al<SUP>+</SUP>/N<SUP>+</SUP> implanted 6H-SiC was carried out. The 6H-SiC wafers were implanted at different substrate temperatures. The photothermal measurements of the conversion coefficient K and the reflectivity R show a strong dependence on the implantation temperature. This result is discussed in relation to Rutherford backscattering spectrometry/ion channeling measurements. The behavior of the reflectivity in dependence on the implantation conditions could be modelized by using a simple two layer optical model. The carried out investigations of the implanted SiC demonstrate, that photothermal methods are suitable for both research and on- line production use." @default.
- W2024869968 created "2016-06-24" @default.
- W2024869968 creator A5047161584 @default.
- W2024869968 creator A5063028599 @default.
- W2024869968 creator A5088805126 @default.
- W2024869968 creator A5089687195 @default.
- W2024869968 date "2000-01-25" @default.
- W2024869968 modified "2023-10-03" @default.
- W2024869968 title "Photothermal measurements of Al+- and Al+/N+- implanted 6H-SiC" @default.
- W2024869968 doi "https://doi.org/10.1117/12.375440" @default.
- W2024869968 hasPublicationYear "2000" @default.
- W2024869968 type Work @default.
- W2024869968 sameAs 2024869968 @default.
- W2024869968 citedByCount "0" @default.
- W2024869968 crossrefType "proceedings-article" @default.
- W2024869968 hasAuthorship W2024869968A5047161584 @default.
- W2024869968 hasAuthorship W2024869968A5063028599 @default.
- W2024869968 hasAuthorship W2024869968A5088805126 @default.
- W2024869968 hasAuthorship W2024869968A5089687195 @default.
- W2024869968 hasConcept C111368507 @default.
- W2024869968 hasConcept C113196181 @default.
- W2024869968 hasConcept C120665830 @default.
- W2024869968 hasConcept C121332964 @default.
- W2024869968 hasConcept C127313418 @default.
- W2024869968 hasConcept C145148216 @default.
- W2024869968 hasConcept C160671074 @default.
- W2024869968 hasConcept C171250308 @default.
- W2024869968 hasConcept C178790620 @default.
- W2024869968 hasConcept C182606246 @default.
- W2024869968 hasConcept C185592680 @default.
- W2024869968 hasConcept C192562407 @default.
- W2024869968 hasConcept C2777289219 @default.
- W2024869968 hasConcept C2777425595 @default.
- W2024869968 hasConcept C41823505 @default.
- W2024869968 hasConcept C43617362 @default.
- W2024869968 hasConcept C49040817 @default.
- W2024869968 hasConceptScore W2024869968C111368507 @default.
- W2024869968 hasConceptScore W2024869968C113196181 @default.
- W2024869968 hasConceptScore W2024869968C120665830 @default.
- W2024869968 hasConceptScore W2024869968C121332964 @default.
- W2024869968 hasConceptScore W2024869968C127313418 @default.
- W2024869968 hasConceptScore W2024869968C145148216 @default.
- W2024869968 hasConceptScore W2024869968C160671074 @default.
- W2024869968 hasConceptScore W2024869968C171250308 @default.
- W2024869968 hasConceptScore W2024869968C178790620 @default.
- W2024869968 hasConceptScore W2024869968C182606246 @default.
- W2024869968 hasConceptScore W2024869968C185592680 @default.
- W2024869968 hasConceptScore W2024869968C192562407 @default.
- W2024869968 hasConceptScore W2024869968C2777289219 @default.
- W2024869968 hasConceptScore W2024869968C2777425595 @default.
- W2024869968 hasConceptScore W2024869968C41823505 @default.
- W2024869968 hasConceptScore W2024869968C43617362 @default.
- W2024869968 hasConceptScore W2024869968C49040817 @default.
- W2024869968 hasLocation W20248699681 @default.
- W2024869968 hasOpenAccess W2024869968 @default.
- W2024869968 hasPrimaryLocation W20248699681 @default.
- W2024869968 hasRelatedWork W1983342941 @default.
- W2024869968 hasRelatedWork W2008031630 @default.
- W2024869968 hasRelatedWork W2017266275 @default.
- W2024869968 hasRelatedWork W2024869968 @default.
- W2024869968 hasRelatedWork W2067172785 @default.
- W2024869968 hasRelatedWork W2070584211 @default.
- W2024869968 hasRelatedWork W2102155896 @default.
- W2024869968 hasRelatedWork W2321502692 @default.
- W2024869968 hasRelatedWork W2473985206 @default.
- W2024869968 hasRelatedWork W2465323125 @default.
- W2024869968 isParatext "false" @default.
- W2024869968 isRetracted "false" @default.
- W2024869968 magId "2024869968" @default.
- W2024869968 workType "article" @default.