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- W2024883482 abstract "The acceleration of the design rule shrinkage and delayed ArF technology currently put pressure upon KrF technology for device development difficulties, so that the extension of KrF lithography to 220nm pitch patterning is under test carefully without using ArF technology." @default.
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- W2024883482 date "2000-07-05" @default.
- W2024883482 modified "2023-09-23" @default.
- W2024883482 title "Patterning 220-nm pitch DRAM patterns by using double mask exposure" @default.
- W2024883482 doi "https://doi.org/10.1117/12.389017" @default.
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