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• W2024883584 abstract "Physical vapour phase deposition processes have successfully expanded into the field of coatings against wear and friction. The different ion plating processes developed so far are compared with respect to their significant characteristics and their ability to deposit TiN coatings onto different materials and onto tools of different sizes. The suitability of the established processes for depositing the multicomponent and multilayer coatings now being developed is discussed. In a series of coating experiments the most flexible processes using the magnetron sputter source and the arc evaporation source are compared for their ability to deposit films of the ternary compounds TixAl1 − xN." @default.
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• W2024883584 date "1988-12-01" @default.
• W2024883584 modified "2023-09-23" @default.
• W2024883584 title "Evaluation of existing ion plating processes for the deposition of multicomponent hard coatings" @default.
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• W2024883584 doi "https://doi.org/10.1016/0257-8972(88)90152-1" @default.
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