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- W2024886483 abstract "Abstract A further increase in the integration density of SRAM and DRAM memories will be limited by resolution as well as overlay accuracy. In the case of synchrotron-based X-ray lithography, the main contribution to the total overlay budget is given by the achievable accuracy of the X-ray masks. In this paper, the pattern placement accuracy of silicon X-ray master masks will be shown, which are fabricated for real device application. The measurement results are obtained with an optimized and improved e-beam measurement system and discussed in terms of linear and nonlinear pattern placement errors. Considering a number of X-ray master masks with different absorber coverage within the step and repeat field (3 × 3 cm 2 ) and different levels of complexity, the average pattern placement error including both statistical and linear contributions can be reduced reproducibly down to about 70 nm, including the principal accuracy of the e-beam pattern generator and measurement system." @default.
- W2024886483 created "2016-06-24" @default.
- W2024886483 creator A5010670648 @default.
- W2024886483 creator A5016129639 @default.
- W2024886483 creator A5020916818 @default.
- W2024886483 creator A5028388266 @default.
- W2024886483 creator A5052097499 @default.
- W2024886483 creator A5082732756 @default.
- W2024886483 date "1989-05-01" @default.
- W2024886483 modified "2023-09-27" @default.
- W2024886483 title "State of the art of pattern placement accuracy of silicon X-ray master masks" @default.
- W2024886483 cites W2057303578 @default.
- W2024886483 cites W2068952998 @default.
- W2024886483 cites W2070563614 @default.
- W2024886483 cites W2083241188 @default.
- W2024886483 cites W3147657011 @default.
- W2024886483 doi "https://doi.org/10.1016/0167-9317(89)90027-0" @default.
- W2024886483 hasPublicationYear "1989" @default.
- W2024886483 type Work @default.
- W2024886483 sameAs 2024886483 @default.
- W2024886483 citedByCount "2" @default.
- W2024886483 crossrefType "journal-article" @default.
- W2024886483 hasAuthorship W2024886483A5010670648 @default.
- W2024886483 hasAuthorship W2024886483A5016129639 @default.
- W2024886483 hasAuthorship W2024886483A5020916818 @default.
- W2024886483 hasAuthorship W2024886483A5028388266 @default.
- W2024886483 hasAuthorship W2024886483A5052097499 @default.
- W2024886483 hasAuthorship W2024886483A5082732756 @default.
- W2024886483 hasConcept C120665830 @default.
- W2024886483 hasConcept C121332964 @default.
- W2024886483 hasConcept C136085584 @default.
- W2024886483 hasConcept C151346624 @default.
- W2024886483 hasConcept C163258240 @default.
- W2024886483 hasConcept C165005293 @default.
- W2024886483 hasConcept C171250308 @default.
- W2024886483 hasConcept C192562407 @default.
- W2024886483 hasConcept C199360897 @default.
- W2024886483 hasConcept C204223013 @default.
- W2024886483 hasConcept C2779227376 @default.
- W2024886483 hasConcept C2780992000 @default.
- W2024886483 hasConcept C41008148 @default.
- W2024886483 hasConcept C41794268 @default.
- W2024886483 hasConcept C49040817 @default.
- W2024886483 hasConcept C53524968 @default.
- W2024886483 hasConcept C544956773 @default.
- W2024886483 hasConcept C62520636 @default.
- W2024886483 hasConcept C68043766 @default.
- W2024886483 hasConcept C7366592 @default.
- W2024886483 hasConcept C76155785 @default.
- W2024886483 hasConcept C9390403 @default.
- W2024886483 hasConceptScore W2024886483C120665830 @default.
- W2024886483 hasConceptScore W2024886483C121332964 @default.
- W2024886483 hasConceptScore W2024886483C136085584 @default.
- W2024886483 hasConceptScore W2024886483C151346624 @default.
- W2024886483 hasConceptScore W2024886483C163258240 @default.
- W2024886483 hasConceptScore W2024886483C165005293 @default.
- W2024886483 hasConceptScore W2024886483C171250308 @default.
- W2024886483 hasConceptScore W2024886483C192562407 @default.
- W2024886483 hasConceptScore W2024886483C199360897 @default.
- W2024886483 hasConceptScore W2024886483C204223013 @default.
- W2024886483 hasConceptScore W2024886483C2779227376 @default.
- W2024886483 hasConceptScore W2024886483C2780992000 @default.
- W2024886483 hasConceptScore W2024886483C41008148 @default.
- W2024886483 hasConceptScore W2024886483C41794268 @default.
- W2024886483 hasConceptScore W2024886483C49040817 @default.
- W2024886483 hasConceptScore W2024886483C53524968 @default.
- W2024886483 hasConceptScore W2024886483C544956773 @default.
- W2024886483 hasConceptScore W2024886483C62520636 @default.
- W2024886483 hasConceptScore W2024886483C68043766 @default.
- W2024886483 hasConceptScore W2024886483C7366592 @default.
- W2024886483 hasConceptScore W2024886483C76155785 @default.
- W2024886483 hasConceptScore W2024886483C9390403 @default.
- W2024886483 hasLocation W20248864831 @default.
- W2024886483 hasOpenAccess W2024886483 @default.
- W2024886483 hasPrimaryLocation W20248864831 @default.
- W2024886483 hasRelatedWork W1962059316 @default.
- W2024886483 hasRelatedWork W1971996807 @default.
- W2024886483 hasRelatedWork W1972667902 @default.
- W2024886483 hasRelatedWork W1977729928 @default.
- W2024886483 hasRelatedWork W1982251904 @default.
- W2024886483 hasRelatedWork W1982884935 @default.
- W2024886483 hasRelatedWork W1998591594 @default.
- W2024886483 hasRelatedWork W2006544361 @default.
- W2024886483 hasRelatedWork W2015450925 @default.
- W2024886483 hasRelatedWork W2015859073 @default.
- W2024886483 hasRelatedWork W2019141467 @default.
- W2024886483 hasRelatedWork W2022844822 @default.
- W2024886483 hasRelatedWork W2023651438 @default.
- W2024886483 hasRelatedWork W2050242676 @default.
- W2024886483 hasRelatedWork W2079694174 @default.
- W2024886483 hasRelatedWork W2107768777 @default.
- W2024886483 hasRelatedWork W2137350949 @default.
- W2024886483 hasRelatedWork W3010684673 @default.
- W2024886483 hasRelatedWork W1964576853 @default.
- W2024886483 hasRelatedWork W2526555241 @default.
- W2024886483 isParatext "false" @default.
- W2024886483 isRetracted "false" @default.
- W2024886483 magId "2024886483" @default.
- W2024886483 workType "article" @default.