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• W2024886677 abstract "Analysis of the Raman Stokes peak position and its shift has been frequently used to estimate either temperature or stress in microelectronics and microelectromechanical system devices. However, if both fields are evolving simultaneously, the Stokes shift represents a convolution of these effects, making it difficult to measure either quantity accurately. By using the relative independence of the Stokes linewidth to applied stress, it is possible to deconvolve the signal into an estimation of both temperature and stress. Using this property, a method is presented whereby the temperature and stress were simultaneously measured in doped polysilicon microheaters. A data collection and analysis method was developed to reduce the uncertainty in the measured stresses resulting in an accuracy of ±40MPa for an average applied stress of −325MPa and temperature of 520°C. Measurement results were compared to three-dimensional finite-element analysis of the microheaters and were shown to be in excellent agreement. This analysis shows that Raman spectroscopy has the potential to measure both evolving temperature and stress fields in devices using a single optical measurement." @default.
• W2024886677 created "2016-06-24" @default.
• W2024886677 creator A5011613373 @default.
• W2024886677 creator A5039403990 @default.
• W2024886677 creator A5050605000 @default.
• W2024886677 creator A5085632540 @default.
• W2024886677 creator A5086623260 @default.
• W2024886677 date "2007-06-01" @default.
• W2024886677 modified "2023-10-05" @default.
• W2024886677 title "Invited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy" @default.
• W2024886677 cites W1968130672 @default.
• W2024886677 cites W1969712884 @default.
• W2024886677 cites W1978606622 @default.
• W2024886677 cites W1988413406 @default.
• W2024886677 cites W1993538862 @default.
• W2024886677 cites W2006192666 @default.
• W2024886677 cites W2010409540 @default.
• W2024886677 cites W2032856932 @default.
• W2024886677 cites W2036307033 @default.
• W2024886677 cites W2043140437 @default.
• W2024886677 cites W2044901543 @default.
• W2024886677 cites W2052880449 @default.
• W2024886677 cites W2056873693 @default.
• W2024886677 cites W2059330048 @default.
• W2024886677 cites W2078040887 @default.
• W2024886677 cites W2082159738 @default.
• W2024886677 cites W2086778233 @default.
• W2024886677 cites W2091830839 @default.
• W2024886677 cites W2103184464 @default.
• W2024886677 doi "https://doi.org/10.1063/1.2738946" @default.
• W2024886677 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/17614598" @default.
• W2024886677 hasPublicationYear "2007" @default.
• W2024886677 type Work @default.
• W2024886677 sameAs 2024886677 @default.
• W2024886677 citedByCount "139" @default.
• W2024886677 countsByYear W20248866772012 @default.
• W2024886677 countsByYear W20248866772013 @default.
• W2024886677 countsByYear W20248866772014 @default.
• W2024886677 countsByYear W20248866772015 @default.
• W2024886677 countsByYear W20248866772016 @default.
• W2024886677 countsByYear W20248866772017 @default.
• W2024886677 countsByYear W20248866772018 @default.
• W2024886677 countsByYear W20248866772019 @default.
• W2024886677 countsByYear W20248866772020 @default.
• W2024886677 countsByYear W20248866772021 @default.
• W2024886677 countsByYear W20248866772022 @default.
• W2024886677 countsByYear W20248866772023 @default.
• W2024886677 crossrefType "journal-article" @default.
• W2024886677 hasAuthorship W2024886677A5011613373 @default.
• W2024886677 hasAuthorship W2024886677A5039403990 @default.
• W2024886677 hasAuthorship W2024886677A5050605000 @default.
• W2024886677 hasAuthorship W2024886677A5085632540 @default.
• W2024886677 hasAuthorship W2024886677A5086623260 @default.
• W2024886677 hasBestOaLocation W20248866773 @default.
• W2024886677 hasConcept C120665830 @default.
• W2024886677 hasConcept C121332964 @default.
• W2024886677 hasConcept C138885662 @default.
• W2024886677 hasConcept C142181693 @default.
• W2024886677 hasConcept C174576160 @default.
• W2024886677 hasConcept C187937830 @default.
• W2024886677 hasConcept C192562407 @default.
• W2024886677 hasConcept C199360897 @default.
• W2024886677 hasConcept C21036866 @default.
• W2024886677 hasConcept C2779843651 @default.
• W2024886677 hasConcept C2780009758 @default.
• W2024886677 hasConcept C40003534 @default.
• W2024886677 hasConcept C41008148 @default.
• W2024886677 hasConcept C41895202 @default.
• W2024886677 hasConcept C49040817 @default.
• W2024886677 hasConcept C520434653 @default.
• W2024886677 hasConcept C72293138 @default.
• W2024886677 hasConcept C77088390 @default.
• W2024886677 hasConcept C97355855 @default.
• W2024886677 hasConceptScore W2024886677C120665830 @default.
• W2024886677 hasConceptScore W2024886677C121332964 @default.
• W2024886677 hasConceptScore W2024886677C138885662 @default.
• W2024886677 hasConceptScore W2024886677C142181693 @default.
• W2024886677 hasConceptScore W2024886677C174576160 @default.
• W2024886677 hasConceptScore W2024886677C187937830 @default.
• W2024886677 hasConceptScore W2024886677C192562407 @default.
• W2024886677 hasConceptScore W2024886677C199360897 @default.
• W2024886677 hasConceptScore W2024886677C21036866 @default.
• W2024886677 hasConceptScore W2024886677C2779843651 @default.
• W2024886677 hasConceptScore W2024886677C2780009758 @default.
• W2024886677 hasConceptScore W2024886677C40003534 @default.
• W2024886677 hasConceptScore W2024886677C41008148 @default.
• W2024886677 hasConceptScore W2024886677C41895202 @default.
• W2024886677 hasConceptScore W2024886677C49040817 @default.
• W2024886677 hasConceptScore W2024886677C520434653 @default.
• W2024886677 hasConceptScore W2024886677C72293138 @default.
• W2024886677 hasConceptScore W2024886677C77088390 @default.
• W2024886677 hasConceptScore W2024886677C97355855 @default.
• W2024886677 hasIssue "6" @default.
• W2024886677 hasLocation W20248866771 @default.
• W2024886677 hasLocation W20248866772 @default.
• W2024886677 hasLocation W20248866773 @default.
• W2024886677 hasLocation W20248866774 @default.
• W2024886677 hasOpenAccess W2024886677 @default.
• W2024886677 hasPrimaryLocation W20248866771 @default.
• W2024886677 hasRelatedWork W1966157512 @default.

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