Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024889431> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2024889431 endingPage "469" @default.
- W2024889431 startingPage "462" @default.
- W2024889431 abstract "GaAs epitaxial layers were grown on (100) GaAs and vicinal substrates (2° off (100) toward (110)) by close-spaced vapor transport (CSVT) using water vapor as transport agent. We demonstrate that the temperature at which water vapor is injected into the reactor, T inj , is a criticial parameter for the layer morphology. Furthermore, the optimum T inj , is a function of water partial pressure, [Formula: see text]. For each [Formula: see text], there is a T inj range for which specular layers are obtained. This range is defined for [Formula: see text] Torr (1 Torr = 133.3 Pa). The only defects appearing on the specular layers grown on (100) GaAs substrates are oval hillocks (structureless oval defects, and occasionally oval plateaus and oval defects with a faceted central core head). All oval hillocks have their long axis, L 1 , parallel to < 110 >. By measuring L 1 and L 2 (the short axis of the defect, perpendicular to L 1 ), lateral growth rates of GaAs are obtained. They vary with [Formula: see text]. At high [Formula: see text], [Formula: see text] is 1 at low water vapor pressure. All oval hillocks result from the contamination of the substrate surface. By using vicinal GaAs substrates, the oval hillock density was decreased to about 500 cm −2 , a result similar to that obtained with molecular beam epitaxy." @default.
- W2024889431 created "2016-06-24" @default.
- W2024889431 creator A5015564508 @default.
- W2024889431 creator A5039431225 @default.
- W2024889431 creator A5049904419 @default.
- W2024889431 creator A5063794844 @default.
- W2024889431 creator A5065877005 @default.
- W2024889431 creator A5088929066 @default.
- W2024889431 date "1993-09-01" @default.
- W2024889431 modified "2023-10-16" @default.
- W2024889431 title "Optimization of the surface morphology of GaAs epitaxial layers grown by close-spaced vapor transport" @default.
- W2024889431 doi "https://doi.org/10.1139/p93-072" @default.
- W2024889431 hasPublicationYear "1993" @default.
- W2024889431 type Work @default.
- W2024889431 sameAs 2024889431 @default.
- W2024889431 citedByCount "1" @default.
- W2024889431 countsByYear W20248894312017 @default.
- W2024889431 crossrefType "journal-article" @default.
- W2024889431 hasAuthorship W2024889431A5015564508 @default.
- W2024889431 hasAuthorship W2024889431A5039431225 @default.
- W2024889431 hasAuthorship W2024889431A5049904419 @default.
- W2024889431 hasAuthorship W2024889431A5063794844 @default.
- W2024889431 hasAuthorship W2024889431A5065877005 @default.
- W2024889431 hasAuthorship W2024889431A5088929066 @default.
- W2024889431 hasConcept C110738630 @default.
- W2024889431 hasConcept C111368507 @default.
- W2024889431 hasConcept C118381688 @default.
- W2024889431 hasConcept C120665830 @default.
- W2024889431 hasConcept C121332964 @default.
- W2024889431 hasConcept C121349320 @default.
- W2024889431 hasConcept C127313418 @default.
- W2024889431 hasConcept C159985019 @default.
- W2024889431 hasConcept C19184958 @default.
- W2024889431 hasConcept C192562407 @default.
- W2024889431 hasConcept C199631012 @default.
- W2024889431 hasConcept C2524010 @default.
- W2024889431 hasConcept C26873012 @default.
- W2024889431 hasConcept C2777289219 @default.
- W2024889431 hasConcept C2779227376 @default.
- W2024889431 hasConcept C30646810 @default.
- W2024889431 hasConcept C33923547 @default.
- W2024889431 hasConcept C499950583 @default.
- W2024889431 hasConcept C54355233 @default.
- W2024889431 hasConcept C62520636 @default.
- W2024889431 hasConcept C6322943 @default.
- W2024889431 hasConcept C86803240 @default.
- W2024889431 hasConcept C97355855 @default.
- W2024889431 hasConceptScore W2024889431C110738630 @default.
- W2024889431 hasConceptScore W2024889431C111368507 @default.
- W2024889431 hasConceptScore W2024889431C118381688 @default.
- W2024889431 hasConceptScore W2024889431C120665830 @default.
- W2024889431 hasConceptScore W2024889431C121332964 @default.
- W2024889431 hasConceptScore W2024889431C121349320 @default.
- W2024889431 hasConceptScore W2024889431C127313418 @default.
- W2024889431 hasConceptScore W2024889431C159985019 @default.
- W2024889431 hasConceptScore W2024889431C19184958 @default.
- W2024889431 hasConceptScore W2024889431C192562407 @default.
- W2024889431 hasConceptScore W2024889431C199631012 @default.
- W2024889431 hasConceptScore W2024889431C2524010 @default.
- W2024889431 hasConceptScore W2024889431C26873012 @default.
- W2024889431 hasConceptScore W2024889431C2777289219 @default.
- W2024889431 hasConceptScore W2024889431C2779227376 @default.
- W2024889431 hasConceptScore W2024889431C30646810 @default.
- W2024889431 hasConceptScore W2024889431C33923547 @default.
- W2024889431 hasConceptScore W2024889431C499950583 @default.
- W2024889431 hasConceptScore W2024889431C54355233 @default.
- W2024889431 hasConceptScore W2024889431C62520636 @default.
- W2024889431 hasConceptScore W2024889431C6322943 @default.
- W2024889431 hasConceptScore W2024889431C86803240 @default.
- W2024889431 hasConceptScore W2024889431C97355855 @default.
- W2024889431 hasIssue "9-10" @default.
- W2024889431 hasLocation W20248894311 @default.
- W2024889431 hasOpenAccess W2024889431 @default.
- W2024889431 hasPrimaryLocation W20248894311 @default.
- W2024889431 hasRelatedWork W1982864195 @default.
- W2024889431 hasRelatedWork W1997225018 @default.
- W2024889431 hasRelatedWork W2002720150 @default.
- W2024889431 hasRelatedWork W2024889431 @default.
- W2024889431 hasRelatedWork W2055754760 @default.
- W2024889431 hasRelatedWork W2090350312 @default.
- W2024889431 hasRelatedWork W2438951080 @default.
- W2024889431 hasRelatedWork W2912827546 @default.
- W2024889431 hasRelatedWork W3169094437 @default.
- W2024889431 hasRelatedWork W648063698 @default.
- W2024889431 hasVolume "71" @default.
- W2024889431 isParatext "false" @default.
- W2024889431 isRetracted "false" @default.
- W2024889431 magId "2024889431" @default.
- W2024889431 workType "article" @default.