Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024893408> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2024893408 endingPage "117301" @default.
- W2024893408 startingPage "117301" @default.
- W2024893408 abstract "We report on the high-performance decomposition and fixation of perfluoro compounds (PFCs) exhausted from dry etching processes and their reaction mechanism with the fixation material prepared from Ca(OH) 2 and Al(OH) 3 mixture. Using gas chromatography–mass spectrometry (GC–MS), powder X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and other analysis methods, it was found that PFCs were successfully decomposed and fixated by the reaction only with calcium compounds, resulting in calcium fluoride (CaF 2 ). Aluminum compounds existing very close to calcium compounds work as a catalyst so that the reaction progresses at much lower temperatures, in the range of 650 to 750 °C, compared with the direct decomposition by combustion. The reaction mechanism is discussed on the basis of the proposed microscopic reaction model. These results are useful for the development of more efficient abatement systems for the greenhouse gases in the exhaust of dry etching processes." @default.
- W2024893408 created "2016-06-24" @default.
- W2024893408 creator A5006676797 @default.
- W2024893408 creator A5012134258 @default.
- W2024893408 creator A5019657108 @default.
- W2024893408 creator A5033650757 @default.
- W2024893408 creator A5056045953 @default.
- W2024893408 creator A5076070750 @default.
- W2024893408 date "2011-10-25" @default.
- W2024893408 modified "2023-09-25" @default.
- W2024893408 title "High-Performance Decomposition and Fixation of Dry Etching Exhaust Perfluoro-Compound Gases and Study of Their Mechanism" @default.
- W2024893408 cites W1977531666 @default.
- W2024893408 cites W1982350596 @default.
- W2024893408 cites W2004726028 @default.
- W2024893408 cites W2012876626 @default.
- W2024893408 cites W2050834090 @default.
- W2024893408 cites W2064829315 @default.
- W2024893408 cites W2350117120 @default.
- W2024893408 doi "https://doi.org/10.1143/jjap.50.117301" @default.
- W2024893408 hasPublicationYear "2011" @default.
- W2024893408 type Work @default.
- W2024893408 sameAs 2024893408 @default.
- W2024893408 citedByCount "1" @default.
- W2024893408 countsByYear W20248934082018 @default.
- W2024893408 crossrefType "journal-article" @default.
- W2024893408 hasAuthorship W2024893408A5006676797 @default.
- W2024893408 hasAuthorship W2024893408A5012134258 @default.
- W2024893408 hasAuthorship W2024893408A5019657108 @default.
- W2024893408 hasAuthorship W2024893408A5033650757 @default.
- W2024893408 hasAuthorship W2024893408A5056045953 @default.
- W2024893408 hasAuthorship W2024893408A5076070750 @default.
- W2024893408 hasConcept C105923489 @default.
- W2024893408 hasConcept C124681953 @default.
- W2024893408 hasConcept C127413603 @default.
- W2024893408 hasConcept C147789679 @default.
- W2024893408 hasConcept C161790260 @default.
- W2024893408 hasConcept C162356407 @default.
- W2024893408 hasConcept C175708663 @default.
- W2024893408 hasConcept C178790620 @default.
- W2024893408 hasConcept C185592680 @default.
- W2024893408 hasConcept C42360764 @default.
- W2024893408 hasConcept C43617362 @default.
- W2024893408 hasConcept C65024703 @default.
- W2024893408 hasConceptScore W2024893408C105923489 @default.
- W2024893408 hasConceptScore W2024893408C124681953 @default.
- W2024893408 hasConceptScore W2024893408C127413603 @default.
- W2024893408 hasConceptScore W2024893408C147789679 @default.
- W2024893408 hasConceptScore W2024893408C161790260 @default.
- W2024893408 hasConceptScore W2024893408C162356407 @default.
- W2024893408 hasConceptScore W2024893408C175708663 @default.
- W2024893408 hasConceptScore W2024893408C178790620 @default.
- W2024893408 hasConceptScore W2024893408C185592680 @default.
- W2024893408 hasConceptScore W2024893408C42360764 @default.
- W2024893408 hasConceptScore W2024893408C43617362 @default.
- W2024893408 hasConceptScore W2024893408C65024703 @default.
- W2024893408 hasIssue "11R" @default.
- W2024893408 hasLocation W20248934081 @default.
- W2024893408 hasOpenAccess W2024893408 @default.
- W2024893408 hasPrimaryLocation W20248934081 @default.
- W2024893408 hasRelatedWork W1972882956 @default.
- W2024893408 hasRelatedWork W1986358266 @default.
- W2024893408 hasRelatedWork W2130940245 @default.
- W2024893408 hasRelatedWork W2323613447 @default.
- W2024893408 hasRelatedWork W2349315888 @default.
- W2024893408 hasRelatedWork W2361986773 @default.
- W2024893408 hasRelatedWork W2369415556 @default.
- W2024893408 hasRelatedWork W2380427091 @default.
- W2024893408 hasRelatedWork W3001316027 @default.
- W2024893408 hasRelatedWork W3043749580 @default.
- W2024893408 hasVolume "50" @default.
- W2024893408 isParatext "false" @default.
- W2024893408 isRetracted "false" @default.
- W2024893408 magId "2024893408" @default.
- W2024893408 workType "article" @default.