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- W2024943908 abstract "Published results on Ge junctions are benchmarked systematically using RS–XJ plots. The electrical activation level required to meet the ITRS targets is calculated. Additionally, new results are presented on shallow furnace-annealed B junctions and shallow laser-annealed As junctions. Co-implanting B junctions with F is shown to degrade junction properties." @default.
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- W2024943908 date "2011-04-01" @default.
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- W2024943908 title "Systematic study of shallow junction formation on germanium substrates" @default.
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