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- W2024965092 abstract "A sensor for measuring the thermal conductivity of gases is presented, which is suitable for the analysis of binary and ternary gas mixtures. The principles of thermal conductivity measurement is distinguished by the lack of hysteresis, short response times, continuous measurement, low drift and lack of wear and tear. The dimensions of the sensor chip are 3.5 mm × 3.5 mm × 0.25 mm. The sensor has a power consumption of 13 mW and a thermal time constant of 7.3 ms at 100 K over-temperature, with N2 as the test gas. This paper deals with the manufacture of the sensor, the methods of describing its behaviour by simulation and the test procedures for its characterization." @default.
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- W2024965092 date "1993-05-01" @default.
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- W2024965092 title "Heat-conduction microsensor based on silicon technology for the analysis of two- and three-component gas mixtures" @default.
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- W2024965092 doi "https://doi.org/10.1016/0925-4005(93)85397-s" @default.
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