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- W2024971264 abstract "TiN thin films were deposited by r.f. reactive sputtering. The as-deposited films and films heat treated at 300, 400 and 550 °C an air and N2 were analyzed by different techniques, i.e. scanning electron microscopy, transmission electron microscopy, thin film X-ray diffraction (Seemann-Bohlin diffractometer), secondary ion mass spectroscopy, X-ray photoelectron spectroscopy, Rutherford backscattering spectroscopy, and elastic recoil detection. The results obtained were used to discuss the capabilities, advantages and limitations of the above-mentioned techniques." @default.
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- W2024971264 date "1990-10-01" @default.
- W2024971264 modified "2023-10-10" @default.
- W2024971264 title "Characterization of titanium nitride thin films" @default.
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- W2024971264 doi "https://doi.org/10.1016/0040-6090(90)90274-h" @default.
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