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• W2024972272 abstract "Molecular dynamics (MD) simulations of large argon clusters impacting on silicon targets were performed. The characteristics of crater formation, a typical collisional effect with large cluster impact were examined from the viewpoint of incident energy, cluster size and incident angle. The MD simulation results suggested that the condition where an incident cluster penetrates into the solid target and causes a crater is mainly dominated by the incident energy-per-atom rather than total incident energy of the cluster. Additionally, the MD simulations of sequential multiple cluster impacts and grazing-angle cluster irradiation on irregular surface structures were studied to characterize the surface modification effects with large cluster ion beam process." @default.
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• W2024972272 date "2010-03-01" @default.
• W2024972272 modified "2023-10-16" @default.
• W2024972272 title "Molecular dynamics simulations for gas cluster ion beam processes" @default.
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• W2024972272 doi "https://doi.org/10.1016/j.vacuum.2009.11.018" @default.
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