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- W2024981649 endingPage "766" @default.
- W2024981649 startingPage "763" @default.
- W2024981649 abstract "Abstract We studied the characterization of thin metallic layers vacuum‐deposited by magnetron sputtering onto commercial polyethylene terephthalate (PET) films in an industrial web coater. Because the technology of metal coating for technical films tends more and more towards nanotechnology, quantitative surface and interface analysis are required to optimize the metallization procedures. An important factor is the thickness of the thin coated layers. A powerful tool to characterize chemical composition and layer thickness of such nanofilms quantitatively is low‐energy Rutherford backscattering spectroscopy (LE‐RBS); it is, however, not suitable for production control. A standard industrial tool for these measurements at higher layer thickness is x‐ray fluorescence spectroscopy (XRF). This method is highly sensitive and reproducible but needs calibration standards. We show that the thickness of chromium layers in the subnanometre range can be determined by means of LE‐RBS without deterioration of the PET film. We further show that a set of layers of different thickness can be measured by LE‐RBS with sufficiently high accuracy to serve as calibration standards for XRF or optical density measurement. From the correlation of the results obtained by RBS and XRF, we learn about the uncertainties induced by the production process (lateral uniformity) and by the analytical techniques. Copyright © 2002 John Wiley & Sons, Ltd." @default.
- W2024981649 created "2016-06-24" @default.
- W2024981649 creator A5005294604 @default.
- W2024981649 creator A5013577907 @default.
- W2024981649 creator A5022285927 @default.
- W2024981649 creator A5052277277 @default.
- W2024981649 creator A5086201841 @default.
- W2024981649 date "2002-08-01" @default.
- W2024981649 modified "2023-10-18" @default.
- W2024981649 title "Characterization of ultrathin Cr layers on PET by RBS and XRF" @default.
- W2024981649 cites W2049110228 @default.
- W2024981649 cites W2061692919 @default.
- W2024981649 cites W2896317716 @default.
- W2024981649 doi "https://doi.org/10.1002/sia.1406" @default.
- W2024981649 hasPublicationYear "2002" @default.
- W2024981649 type Work @default.
- W2024981649 sameAs 2024981649 @default.
- W2024981649 citedByCount "5" @default.
- W2024981649 countsByYear W20249816492021 @default.
- W2024981649 crossrefType "journal-article" @default.
- W2024981649 hasAuthorship W2024981649A5005294604 @default.
- W2024981649 hasAuthorship W2024981649A5013577907 @default.
- W2024981649 hasAuthorship W2024981649A5022285927 @default.
- W2024981649 hasAuthorship W2024981649A5052277277 @default.
- W2024981649 hasAuthorship W2024981649A5086201841 @default.
- W2024981649 hasConcept C105795698 @default.
- W2024981649 hasConcept C113196181 @default.
- W2024981649 hasConcept C121332964 @default.
- W2024981649 hasConcept C159985019 @default.
- W2024981649 hasConcept C165838908 @default.
- W2024981649 hasConcept C171250308 @default.
- W2024981649 hasConcept C185592680 @default.
- W2024981649 hasConcept C19067145 @default.
- W2024981649 hasConcept C192562407 @default.
- W2024981649 hasConcept C22423302 @default.
- W2024981649 hasConcept C2779227376 @default.
- W2024981649 hasConcept C2780017307 @default.
- W2024981649 hasConcept C2780841128 @default.
- W2024981649 hasConcept C2781448156 @default.
- W2024981649 hasConcept C32891209 @default.
- W2024981649 hasConcept C33923547 @default.
- W2024981649 hasConcept C43617362 @default.
- W2024981649 hasConcept C49040817 @default.
- W2024981649 hasConcept C61427134 @default.
- W2024981649 hasConcept C62520636 @default.
- W2024981649 hasConceptScore W2024981649C105795698 @default.
- W2024981649 hasConceptScore W2024981649C113196181 @default.
- W2024981649 hasConceptScore W2024981649C121332964 @default.
- W2024981649 hasConceptScore W2024981649C159985019 @default.
- W2024981649 hasConceptScore W2024981649C165838908 @default.
- W2024981649 hasConceptScore W2024981649C171250308 @default.
- W2024981649 hasConceptScore W2024981649C185592680 @default.
- W2024981649 hasConceptScore W2024981649C19067145 @default.
- W2024981649 hasConceptScore W2024981649C192562407 @default.
- W2024981649 hasConceptScore W2024981649C22423302 @default.
- W2024981649 hasConceptScore W2024981649C2779227376 @default.
- W2024981649 hasConceptScore W2024981649C2780017307 @default.
- W2024981649 hasConceptScore W2024981649C2780841128 @default.
- W2024981649 hasConceptScore W2024981649C2781448156 @default.
- W2024981649 hasConceptScore W2024981649C32891209 @default.
- W2024981649 hasConceptScore W2024981649C33923547 @default.
- W2024981649 hasConceptScore W2024981649C43617362 @default.
- W2024981649 hasConceptScore W2024981649C49040817 @default.
- W2024981649 hasConceptScore W2024981649C61427134 @default.
- W2024981649 hasConceptScore W2024981649C62520636 @default.
- W2024981649 hasIssue "1" @default.
- W2024981649 hasLocation W20249816491 @default.
- W2024981649 hasOpenAccess W2024981649 @default.
- W2024981649 hasPrimaryLocation W20249816491 @default.
- W2024981649 hasRelatedWork W1782915897 @default.
- W2024981649 hasRelatedWork W1967383351 @default.
- W2024981649 hasRelatedWork W1999931307 @default.
- W2024981649 hasRelatedWork W2295922851 @default.
- W2024981649 hasRelatedWork W2363568127 @default.
- W2024981649 hasRelatedWork W2495721426 @default.
- W2024981649 hasRelatedWork W3146228713 @default.
- W2024981649 hasRelatedWork W4235607865 @default.
- W2024981649 hasRelatedWork W4304014268 @default.
- W2024981649 hasRelatedWork W850150341 @default.
- W2024981649 hasVolume "34" @default.
- W2024981649 isParatext "false" @default.
- W2024981649 isRetracted "false" @default.
- W2024981649 magId "2024981649" @default.
- W2024981649 workType "article" @default.