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- W2024984742 endingPage "046406" @default.
- W2024984742 startingPage "046406" @default.
- W2024984742 abstract "Al2O3 films were deposited on single crystalline silicon wafers by atomic layer deposition. Both passivation and antireflectance performances are studied in detail. 30 nm Al2O3 passivated n-type and p-type Si shows a maximum effective minority carrier lifetime (τeff) of ~5.2 ms and ~4.7 ms, corresponding to a low surface recombination velocity of ~3.8 cm s−1 and ~4.2 cm s−1, respectively. By drawing a contour map of post-deposition annealing (PDA) temperature, PDA time and τeff, a wide PDA window is obtained for obtaining good passivation performances. The excellent passivation performances are related to the large, negative fixed charge density within Al2O3 films and the formation of interfacial SiO2 layer at the Al2O3/Si interface. Antireflectance performances are also studied in detail for Al2O3 and Al2O3/SiNx double-layer on textured Si. For obtaining a low average reflectance between 2.6% and 3%, a wide film-thickness window of ~30 nm for Al2O3 and SiNx layer is observed for Al2O3/SiNx double-layer on textured Si. Our results indicate that Al2O3 films have excellent surface passivation and antireflectance performances with a wide processing window, which is favorable for c-Si solar cell applications." @default.
- W2024984742 created "2016-06-24" @default.
- W2024984742 creator A5010376321 @default.
- W2024984742 creator A5037948390 @default.
- W2024984742 creator A5053862572 @default.
- W2024984742 date "2014-10-20" @default.
- W2024984742 modified "2023-09-26" @default.
- W2024984742 title "Surface passivation and antireflectance performances for atomic-layer-deposited Al2O3 films" @default.
- W2024984742 cites W1614676509 @default.
- W2024984742 cites W1970107408 @default.
- W2024984742 cites W1974049879 @default.
- W2024984742 cites W1975783833 @default.
- W2024984742 cites W1977542574 @default.
- W2024984742 cites W1994053589 @default.
- W2024984742 cites W1994653731 @default.
- W2024984742 cites W2006279741 @default.
- W2024984742 cites W2029637177 @default.
- W2024984742 cites W2035253417 @default.
- W2024984742 cites W2040802789 @default.
- W2024984742 cites W2045019097 @default.
- W2024984742 cites W2052200067 @default.
- W2024984742 cites W2063392550 @default.
- W2024984742 cites W2065210782 @default.
- W2024984742 cites W2075786371 @default.
- W2024984742 cites W2105720384 @default.
- W2024984742 cites W2118725784 @default.
- W2024984742 cites W2128738760 @default.
- W2024984742 cites W2139180413 @default.
- W2024984742 cites W2139690219 @default.
- W2024984742 cites W2154103482 @default.
- W2024984742 cites W2165680720 @default.
- W2024984742 cites W2166451914 @default.
- W2024984742 cites W2168751187 @default.
- W2024984742 cites W3100400104 @default.
- W2024984742 doi "https://doi.org/10.1088/2053-1591/1/4/046406" @default.
- W2024984742 hasPublicationYear "2014" @default.
- W2024984742 type Work @default.
- W2024984742 sameAs 2024984742 @default.
- W2024984742 citedByCount "0" @default.
- W2024984742 crossrefType "journal-article" @default.
- W2024984742 hasAuthorship W2024984742A5010376321 @default.
- W2024984742 hasAuthorship W2024984742A5037948390 @default.
- W2024984742 hasAuthorship W2024984742A5053862572 @default.
- W2024984742 hasConcept C127413603 @default.
- W2024984742 hasConcept C171250308 @default.
- W2024984742 hasConcept C191897082 @default.
- W2024984742 hasConcept C192562407 @default.
- W2024984742 hasConcept C197751951 @default.
- W2024984742 hasConcept C2524010 @default.
- W2024984742 hasConcept C2776799497 @default.
- W2024984742 hasConcept C2779227376 @default.
- W2024984742 hasConcept C33574316 @default.
- W2024984742 hasConcept C33923547 @default.
- W2024984742 hasConcept C42360764 @default.
- W2024984742 hasConcept C69544855 @default.
- W2024984742 hasConceptScore W2024984742C127413603 @default.
- W2024984742 hasConceptScore W2024984742C171250308 @default.
- W2024984742 hasConceptScore W2024984742C191897082 @default.
- W2024984742 hasConceptScore W2024984742C192562407 @default.
- W2024984742 hasConceptScore W2024984742C197751951 @default.
- W2024984742 hasConceptScore W2024984742C2524010 @default.
- W2024984742 hasConceptScore W2024984742C2776799497 @default.
- W2024984742 hasConceptScore W2024984742C2779227376 @default.
- W2024984742 hasConceptScore W2024984742C33574316 @default.
- W2024984742 hasConceptScore W2024984742C33923547 @default.
- W2024984742 hasConceptScore W2024984742C42360764 @default.
- W2024984742 hasConceptScore W2024984742C69544855 @default.
- W2024984742 hasIssue "4" @default.
- W2024984742 hasLocation W20249847421 @default.
- W2024984742 hasOpenAccess W2024984742 @default.
- W2024984742 hasPrimaryLocation W20249847421 @default.
- W2024984742 hasRelatedWork W2154322410 @default.
- W2024984742 hasRelatedWork W2174963655 @default.
- W2024984742 hasRelatedWork W2272805540 @default.
- W2024984742 hasRelatedWork W2522663677 @default.
- W2024984742 hasRelatedWork W2594482387 @default.
- W2024984742 hasRelatedWork W2899615788 @default.
- W2024984742 hasRelatedWork W2973126787 @default.
- W2024984742 hasRelatedWork W3108601424 @default.
- W2024984742 hasRelatedWork W4224122414 @default.
- W2024984742 hasRelatedWork W4313397424 @default.
- W2024984742 hasVolume "1" @default.
- W2024984742 isParatext "false" @default.
- W2024984742 isRetracted "false" @default.
- W2024984742 magId "2024984742" @default.
- W2024984742 workType "article" @default.