Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024993553> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2024993553 endingPage "115" @default.
- W2024993553 startingPage "111" @default.
- W2024993553 abstract "다마신 구리 배선에서의 동적인 전기장에 따른 절연체 파괴거동을 연구하였다. DC, 단극성, 및 이극성 펄스 조건 중에서 절연체의 수명은 이극성 펄스 조건에서 가장 길었다. DC 및 단극성 펄스 조건에서는 절연체에 가해지는 전기장의 방향이 바뀌지 않지만 이극성 펄스 조건에서는 전기장의 방향이 반복적으로 180도 바뀌기 때문에, 이극성 펄스 조건에서는 절연체의 구리오염이 억제되고, 이로 인해서 절연체 수명이 이극성 펄스 조건에서 가장 긴 것으로 판단된다. 단극성 펄스 조건에서 펄스 주파수가 커질수록 DC 조건보다 절연체의 수명이 증가하였다. 이는 절연체 수명에 구리오염 뿐만 아니라 내재적인 절연파괴현상이 상당한 영향을 미치며, 절연체 분자결합파괴가 일어날 확률은 펄스 폭이 좁아질수록 감소한다고 판단된다. Effect of dynamic electric fields on dielectric breakdown behavior in Cu damascene interconnects was investigated. Among the DC, unipolar, and bipolar pulse conditions, the longest dielectric lifetime is observed under the bipolar condition because backward Cu ion drift occurs when the direction of electric field is changed by 180 degrees and Cu contamination is prohibited as a results. Under the unipolar pulse condition, the dielectric lifetime increases as pulse frequency increases and it exceed the lifetime under DC condition. It suggests that the intrinsic breakdown of dielectrics significantly affect the dielectric breakdown in addition to Cu contamination. As the unipolar pulse width decreases, dielectric bond breakdown is more difficult to occur." @default.
- W2024993553 created "2016-06-24" @default.
- W2024993553 creator A5019153344 @default.
- W2024993553 creator A5025679671 @default.
- W2024993553 creator A5036133284 @default.
- W2024993553 creator A5044109328 @default.
- W2024993553 creator A5062034308 @default.
- W2024993553 creator A5083829802 @default.
- W2024993553 date "2014-12-30" @default.
- W2024993553 modified "2023-10-16" @default.
- W2024993553 title "Effect of Dynamic Electric Fields on Dielectric Reliability in Cu Damascene Interconnects" @default.
- W2024993553 cites W1963968292 @default.
- W2024993553 cites W1994459075 @default.
- W2024993553 cites W1999856163 @default.
- W2024993553 cites W2022165761 @default.
- W2024993553 cites W2032115128 @default.
- W2024993553 cites W2046235121 @default.
- W2024993553 cites W2070047877 @default.
- W2024993553 cites W2075697254 @default.
- W2024993553 cites W2113709354 @default.
- W2024993553 cites W2126712109 @default.
- W2024993553 cites W2127438874 @default.
- W2024993553 cites W2155022099 @default.
- W2024993553 cites W2156373378 @default.
- W2024993553 cites W2318603682 @default.
- W2024993553 cites W3117889233 @default.
- W2024993553 cites W3147069279 @default.
- W2024993553 cites W635017418 @default.
- W2024993553 doi "https://doi.org/10.6117/kmeps.2014.21.4.111" @default.
- W2024993553 hasPublicationYear "2014" @default.
- W2024993553 type Work @default.
- W2024993553 sameAs 2024993553 @default.
- W2024993553 citedByCount "0" @default.
- W2024993553 crossrefType "journal-article" @default.
- W2024993553 hasAuthorship W2024993553A5019153344 @default.
- W2024993553 hasAuthorship W2024993553A5025679671 @default.
- W2024993553 hasAuthorship W2024993553A5036133284 @default.
- W2024993553 hasAuthorship W2024993553A5044109328 @default.
- W2024993553 hasAuthorship W2024993553A5062034308 @default.
- W2024993553 hasAuthorship W2024993553A5083829802 @default.
- W2024993553 hasBestOaLocation W20249935531 @default.
- W2024993553 hasConcept C116372231 @default.
- W2024993553 hasConcept C119224816 @default.
- W2024993553 hasConcept C119599485 @default.
- W2024993553 hasConcept C121332964 @default.
- W2024993553 hasConcept C127413603 @default.
- W2024993553 hasConcept C133386390 @default.
- W2024993553 hasConcept C159985019 @default.
- W2024993553 hasConcept C163258240 @default.
- W2024993553 hasConcept C165801399 @default.
- W2024993553 hasConcept C192562407 @default.
- W2024993553 hasConcept C2780167933 @default.
- W2024993553 hasConcept C43214815 @default.
- W2024993553 hasConcept C49040817 @default.
- W2024993553 hasConcept C60799052 @default.
- W2024993553 hasConcept C62520636 @default.
- W2024993553 hasConcept C70401718 @default.
- W2024993553 hasConceptScore W2024993553C116372231 @default.
- W2024993553 hasConceptScore W2024993553C119224816 @default.
- W2024993553 hasConceptScore W2024993553C119599485 @default.
- W2024993553 hasConceptScore W2024993553C121332964 @default.
- W2024993553 hasConceptScore W2024993553C127413603 @default.
- W2024993553 hasConceptScore W2024993553C133386390 @default.
- W2024993553 hasConceptScore W2024993553C159985019 @default.
- W2024993553 hasConceptScore W2024993553C163258240 @default.
- W2024993553 hasConceptScore W2024993553C165801399 @default.
- W2024993553 hasConceptScore W2024993553C192562407 @default.
- W2024993553 hasConceptScore W2024993553C2780167933 @default.
- W2024993553 hasConceptScore W2024993553C43214815 @default.
- W2024993553 hasConceptScore W2024993553C49040817 @default.
- W2024993553 hasConceptScore W2024993553C60799052 @default.
- W2024993553 hasConceptScore W2024993553C62520636 @default.
- W2024993553 hasConceptScore W2024993553C70401718 @default.
- W2024993553 hasIssue "4" @default.
- W2024993553 hasLocation W20249935531 @default.
- W2024993553 hasOpenAccess W2024993553 @default.
- W2024993553 hasPrimaryLocation W20249935531 @default.
- W2024993553 hasRelatedWork W2013766968 @default.
- W2024993553 hasRelatedWork W2024993553 @default.
- W2024993553 hasRelatedWork W2035303592 @default.
- W2024993553 hasRelatedWork W2124270173 @default.
- W2024993553 hasRelatedWork W2583113332 @default.
- W2024993553 hasRelatedWork W2998491025 @default.
- W2024993553 hasRelatedWork W4205491131 @default.
- W2024993553 hasRelatedWork W4292714664 @default.
- W2024993553 hasRelatedWork W4300861320 @default.
- W2024993553 hasRelatedWork W4312059557 @default.
- W2024993553 hasVolume "21" @default.
- W2024993553 isParatext "false" @default.
- W2024993553 isRetracted "false" @default.
- W2024993553 magId "2024993553" @default.
- W2024993553 workType "article" @default.