Matches in SemOpenAlex for { <https://semopenalex.org/work/W2025134484> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2025134484 abstract "This paper presents a silicon-based MEM resonant light sensor, a novel application for MEM resonators. The sensor is a particular kind of micro-bolometer in which the temperature increase of the heat absorber material is measured as a change in the resonant frequency, as opposed to the more traditional resistance measurement. A theoretical model, based on the finite element approach, will be presented together with measurements of fabricated sensors. The sensors were fabricated in a silicon-germanium (SiGe) based technology, with a 4 ¿m thick structural layer. The sensors exhibited measured sensitivities up to 53 ppm/¿W. From a theoretical analysis a temperature increase of 4.2 K is predicted, which is in good agreement with the measured value of 5 K." @default.
- W2025134484 created "2016-06-24" @default.
- W2025134484 creator A5006353399 @default.
- W2025134484 creator A5007733732 @default.
- W2025134484 creator A5023285948 @default.
- W2025134484 creator A5062138171 @default.
- W2025134484 creator A5069171098 @default.
- W2025134484 creator A5073348744 @default.
- W2025134484 creator A5080224527 @default.
- W2025134484 date "2010-01-01" @default.
- W2025134484 modified "2023-10-03" @default.
- W2025134484 title "Light sensitive SiGe MEM resonator for detection and frequency tuning applications." @default.
- W2025134484 cites W2015794221 @default.
- W2025134484 cites W2024962328 @default.
- W2025134484 cites W2052204890 @default.
- W2025134484 cites W2060326026 @default.
- W2025134484 cites W2086171002 @default.
- W2025134484 cites W2108139409 @default.
- W2025134484 cites W389868541 @default.
- W2025134484 cites W4250057107 @default.
- W2025134484 doi "https://doi.org/10.1109/memsys.2010.5442314" @default.
- W2025134484 hasPublicationYear "2010" @default.
- W2025134484 type Work @default.
- W2025134484 sameAs 2025134484 @default.
- W2025134484 citedByCount "9" @default.
- W2025134484 countsByYear W20251344842013 @default.
- W2025134484 countsByYear W20251344842015 @default.
- W2025134484 crossrefType "proceedings-article" @default.
- W2025134484 hasAuthorship W2025134484A5006353399 @default.
- W2025134484 hasAuthorship W2025134484A5007733732 @default.
- W2025134484 hasAuthorship W2025134484A5023285948 @default.
- W2025134484 hasAuthorship W2025134484A5062138171 @default.
- W2025134484 hasAuthorship W2025134484A5069171098 @default.
- W2025134484 hasAuthorship W2025134484A5073348744 @default.
- W2025134484 hasAuthorship W2025134484A5080224527 @default.
- W2025134484 hasConcept C120665830 @default.
- W2025134484 hasConcept C121332964 @default.
- W2025134484 hasConcept C127413603 @default.
- W2025134484 hasConcept C135628077 @default.
- W2025134484 hasConcept C171250308 @default.
- W2025134484 hasConcept C192562407 @default.
- W2025134484 hasConcept C21028948 @default.
- W2025134484 hasConcept C21200559 @default.
- W2025134484 hasConcept C24326235 @default.
- W2025134484 hasConcept C2779227376 @default.
- W2025134484 hasConcept C2780389399 @default.
- W2025134484 hasConcept C49040817 @default.
- W2025134484 hasConcept C544956773 @default.
- W2025134484 hasConcept C550623735 @default.
- W2025134484 hasConcept C62520636 @default.
- W2025134484 hasConcept C66938386 @default.
- W2025134484 hasConcept C72293138 @default.
- W2025134484 hasConcept C94915269 @default.
- W2025134484 hasConcept C97126364 @default.
- W2025134484 hasConceptScore W2025134484C120665830 @default.
- W2025134484 hasConceptScore W2025134484C121332964 @default.
- W2025134484 hasConceptScore W2025134484C127413603 @default.
- W2025134484 hasConceptScore W2025134484C135628077 @default.
- W2025134484 hasConceptScore W2025134484C171250308 @default.
- W2025134484 hasConceptScore W2025134484C192562407 @default.
- W2025134484 hasConceptScore W2025134484C21028948 @default.
- W2025134484 hasConceptScore W2025134484C21200559 @default.
- W2025134484 hasConceptScore W2025134484C24326235 @default.
- W2025134484 hasConceptScore W2025134484C2779227376 @default.
- W2025134484 hasConceptScore W2025134484C2780389399 @default.
- W2025134484 hasConceptScore W2025134484C49040817 @default.
- W2025134484 hasConceptScore W2025134484C544956773 @default.
- W2025134484 hasConceptScore W2025134484C550623735 @default.
- W2025134484 hasConceptScore W2025134484C62520636 @default.
- W2025134484 hasConceptScore W2025134484C66938386 @default.
- W2025134484 hasConceptScore W2025134484C72293138 @default.
- W2025134484 hasConceptScore W2025134484C94915269 @default.
- W2025134484 hasConceptScore W2025134484C97126364 @default.
- W2025134484 hasLocation W20251344841 @default.
- W2025134484 hasOpenAccess W2025134484 @default.
- W2025134484 hasPrimaryLocation W20251344841 @default.
- W2025134484 hasRelatedWork W1964693682 @default.
- W2025134484 hasRelatedWork W1966505737 @default.
- W2025134484 hasRelatedWork W2333112271 @default.
- W2025134484 hasRelatedWork W2477966995 @default.
- W2025134484 hasRelatedWork W2952373255 @default.
- W2025134484 hasRelatedWork W3007050845 @default.
- W2025134484 hasRelatedWork W3034239317 @default.
- W2025134484 hasRelatedWork W3084085039 @default.
- W2025134484 hasRelatedWork W3093008543 @default.
- W2025134484 hasRelatedWork W4211025318 @default.
- W2025134484 isParatext "false" @default.
- W2025134484 isRetracted "false" @default.
- W2025134484 magId "2025134484" @default.
- W2025134484 workType "article" @default.