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- W2025154980 abstract "As optical lithography moves into the area of submicron geometries, an increased understanding of lithographic process parameters is required. One area which requires careful examination is the interaction of the photoresist with specific spectral components of the actinic light. This will allow the photoresist performance to be separated from the performance of the imaging optics. An accurate indication of photoresist performance requires the measurement of photoresist response to a specific wavelength and energy dose. The spectrosensitometer reported on here was developed to address this need." @default.
- W2025154980 created "2016-06-24" @default.
- W2025154980 creator A5002598868 @default.
- W2025154980 creator A5058685573 @default.
- W2025154980 creator A5059086964 @default.
- W2025154980 date "1988-01-01" @default.
- W2025154980 modified "2023-09-23" @default.
- W2025154980 title "<title>Measuring Photoresist Spectral Response With A Spectrosensitometer</title>" @default.
- W2025154980 doi "https://doi.org/10.1117/12.968415" @default.
- W2025154980 hasPublicationYear "1988" @default.
- W2025154980 type Work @default.
- W2025154980 sameAs 2025154980 @default.
- W2025154980 citedByCount "0" @default.
- W2025154980 crossrefType "proceedings-article" @default.
- W2025154980 hasAuthorship W2025154980A5002598868 @default.
- W2025154980 hasAuthorship W2025154980A5058685573 @default.
- W2025154980 hasAuthorship W2025154980A5059086964 @default.
- W2025154980 hasConcept C105487726 @default.
- W2025154980 hasConcept C120665830 @default.
- W2025154980 hasConcept C121332964 @default.
- W2025154980 hasConcept C134406635 @default.
- W2025154980 hasConcept C171250308 @default.
- W2025154980 hasConcept C192562407 @default.
- W2025154980 hasConcept C204223013 @default.
- W2025154980 hasConcept C2779227376 @default.
- W2025154980 hasConcept C49040817 @default.
- W2025154980 hasConcept C53524968 @default.
- W2025154980 hasConcept C6260449 @default.
- W2025154980 hasConceptScore W2025154980C105487726 @default.
- W2025154980 hasConceptScore W2025154980C120665830 @default.
- W2025154980 hasConceptScore W2025154980C121332964 @default.
- W2025154980 hasConceptScore W2025154980C134406635 @default.
- W2025154980 hasConceptScore W2025154980C171250308 @default.
- W2025154980 hasConceptScore W2025154980C192562407 @default.
- W2025154980 hasConceptScore W2025154980C204223013 @default.
- W2025154980 hasConceptScore W2025154980C2779227376 @default.
- W2025154980 hasConceptScore W2025154980C49040817 @default.
- W2025154980 hasConceptScore W2025154980C53524968 @default.
- W2025154980 hasConceptScore W2025154980C6260449 @default.
- W2025154980 hasLocation W20251549801 @default.
- W2025154980 hasOpenAccess W2025154980 @default.
- W2025154980 hasPrimaryLocation W20251549801 @default.
- W2025154980 hasRelatedWork W1583915255 @default.
- W2025154980 hasRelatedWork W1933867914 @default.
- W2025154980 hasRelatedWork W1965394073 @default.
- W2025154980 hasRelatedWork W1975154771 @default.
- W2025154980 hasRelatedWork W1998592917 @default.
- W2025154980 hasRelatedWork W2020874118 @default.
- W2025154980 hasRelatedWork W2028232824 @default.
- W2025154980 hasRelatedWork W2029996626 @default.
- W2025154980 hasRelatedWork W2030704271 @default.
- W2025154980 hasRelatedWork W2030942664 @default.
- W2025154980 hasRelatedWork W2042162778 @default.
- W2025154980 hasRelatedWork W2056046643 @default.
- W2025154980 hasRelatedWork W2098854302 @default.
- W2025154980 hasRelatedWork W2348230487 @default.
- W2025154980 hasRelatedWork W2540646846 @default.
- W2025154980 hasRelatedWork W2765180055 @default.
- W2025154980 hasRelatedWork W2794209721 @default.
- W2025154980 hasRelatedWork W3006776739 @default.
- W2025154980 hasRelatedWork W2816315855 @default.
- W2025154980 hasRelatedWork W2834868992 @default.
- W2025154980 isParatext "false" @default.
- W2025154980 isRetracted "false" @default.
- W2025154980 magId "2025154980" @default.
- W2025154980 workType "article" @default.