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- W2025249191 abstract "The enhancement of the electron beam sensitivity by a factor of ten has been achieved in silver adsorbed g−Ge0.25Se0.75 inorganic resist by oblique deposition of the amorphous chalcogenide films. The electron beam induced chemical and structural changes in obliquely deposited films, the lithographic performance, and the resolution limits are reported." @default.
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- W2025249191 date "1981-11-01" @default.
- W2025249191 modified "2023-09-26" @default.
- W2025249191 title "Oblique deposition enhanced sensitivity in electron beam exposed <i>g</i>‐Ge<sub><i>x</i></sub>Se<sub>1−<i>x</i></sub> inorganic resist" @default.
- W2025249191 doi "https://doi.org/10.1116/1.571213" @default.
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