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- W2025332384 abstract "The mechanism of the nitrogen co-implant to suppress the boron penetration in p+-polycrystalline silicon gate has been investigated. The nitrogen coimplant with the BF+2 combines with the boron to form a B–N complex which results in a retardation of boron diffusion. It is found that metal–oxide–silicon capacitors with nitrogen implantation show improved electrical properties." @default.
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- W2025332384 date "1996-09-16" @default.
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- W2025332384 title "Mechanism of nitrogen coimplant for suppressing boron penetration in <i>p</i><sup>+</sup>‐polycrystalline silicon gate of <i>p</i> metal–oxide semiconductor field effect transistor" @default.
- W2025332384 doi "https://doi.org/10.1063/1.117484" @default.
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