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• W2025409355 endingPage "505303" @default.
• W2025409355 startingPage "505303" @default.
• W2025409355 abstract "A novel and simple technique for the controllable shrinkage of inverted-pyramid silicon (Si) nanopore arrays is reported. The Si nanopore arrays with sizes from 60 to 150 nm, made using a combination of dry and wet etching, were shrunk to sub 10 nm, or even closed, using direct dry-oxygen oxidation at 900 ° C. The shrinkage process of the pyramidal nanopore induced by oxidation was carefully modeled and simulated. The simulation was found to be in good agreement with the experimental data within most of the oxidation time range. Using this method, square nanopore arrays with an average size of 30 nm, and rectangular nanopores and nanoslits with feature sizes as small as 8 nm, have been obtained. Furthermore, focused ion beam cutting experiments revealed that the inner structure of the nanopore after the shrinkage kept its typical inverted-pyramid shape, which is of importance in many fields such as biomolecular sensors and ionic analogs of electronic devices, as well as nanostencils for surface nano-patterning." @default.
• W2025409355 created "2016-06-24" @default.
• W2025409355 creator A5022741791 @default.
• W2025409355 creator A5050092994 @default.
• W2025409355 creator A5050419964 @default.
• W2025409355 creator A5060106526 @default.
• W2025409355 creator A5064488288 @default.
• W2025409355 creator A5070615518 @default.
• W2025409355 creator A5091376481 @default.
• W2025409355 date "2013-11-27" @default.
• W2025409355 modified "2023-10-18" @default.
• W2025409355 title "Controllable shrinking of inverted-pyramid silicon nanopore arrays by dry-oxygen oxidation" @default.
• W2025409355 cites W1964752817 @default.
• W2025409355 cites W1966921147 @default.
• W2025409355 cites W1984071764 @default.
• W2025409355 cites W1991674727 @default.
• W2025409355 cites W1996874518 @default.
• W2025409355 cites W1998669303 @default.
• W2025409355 cites W2003437307 @default.
• W2025409355 cites W2008083269 @default.
• W2025409355 cites W2040879832 @default.
• W2025409355 cites W2042489394 @default.
• W2025409355 cites W2043730462 @default.
• W2025409355 cites W2044366676 @default.
• W2025409355 cites W2047915532 @default.
• W2025409355 cites W2051524724 @default.
• W2025409355 cites W2057493368 @default.
• W2025409355 cites W2058779451 @default.
• W2025409355 cites W2064907511 @default.
• W2025409355 cites W2074266523 @default.
• W2025409355 cites W2093914900 @default.
• W2025409355 cites W2095898308 @default.
• W2025409355 cites W2105235405 @default.
• W2025409355 cites W2120603239 @default.
• W2025409355 cites W2120949014 @default.
• W2025409355 cites W2124573354 @default.
• W2025409355 cites W2135401474 @default.
• W2025409355 cites W2143132002 @default.
• W2025409355 cites W2143847761 @default.
• W2025409355 cites W2161199505 @default.
• W2025409355 cites W2161335211 @default.
• W2025409355 cites W2171861123 @default.
• W2025409355 cites W2320195843 @default.
• W2025409355 cites W4240369344 @default.
• W2025409355 doi "https://doi.org/10.1088/0957-4484/24/50/505303" @default.
• W2025409355 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/24285505" @default.
• W2025409355 hasPublicationYear "2013" @default.
• W2025409355 type Work @default.
• W2025409355 sameAs 2025409355 @default.
• W2025409355 citedByCount "13" @default.
• W2025409355 countsByYear W20254093552014 @default.
• W2025409355 countsByYear W20254093552015 @default.
• W2025409355 countsByYear W20254093552016 @default.
• W2025409355 countsByYear W20254093552017 @default.
• W2025409355 countsByYear W20254093552018 @default.
• W2025409355 countsByYear W20254093552019 @default.
• W2025409355 countsByYear W20254093552021 @default.
• W2025409355 countsByYear W20254093552022 @default.
• W2025409355 crossrefType "journal-article" @default.
• W2025409355 hasAuthorship W2025409355A5022741791 @default.
• W2025409355 hasAuthorship W2025409355A5050092994 @default.
• W2025409355 hasAuthorship W2025409355A5050419964 @default.
• W2025409355 hasAuthorship W2025409355A5060106526 @default.
• W2025409355 hasAuthorship W2025409355A5064488288 @default.
• W2025409355 hasAuthorship W2025409355A5070615518 @default.
• W2025409355 hasAuthorship W2025409355A5091376481 @default.
• W2025409355 hasConcept C120665830 @default.
• W2025409355 hasConcept C121332964 @default.
• W2025409355 hasConcept C141795571 @default.
• W2025409355 hasConcept C142575187 @default.
• W2025409355 hasConcept C145148216 @default.
• W2025409355 hasConcept C159985019 @default.
• W2025409355 hasConcept C171250308 @default.
• W2025409355 hasConcept C178790620 @default.
• W2025409355 hasConcept C180145272 @default.
• W2025409355 hasConcept C185592680 @default.
• W2025409355 hasConcept C192562407 @default.
• W2025409355 hasConcept C2182769 @default.
• W2025409355 hasConcept C49040817 @default.
• W2025409355 hasConcept C544956773 @default.
• W2025409355 hasConceptScore W2025409355C120665830 @default.
• W2025409355 hasConceptScore W2025409355C121332964 @default.
• W2025409355 hasConceptScore W2025409355C141795571 @default.
• W2025409355 hasConceptScore W2025409355C142575187 @default.
• W2025409355 hasConceptScore W2025409355C145148216 @default.
• W2025409355 hasConceptScore W2025409355C159985019 @default.
• W2025409355 hasConceptScore W2025409355C171250308 @default.
• W2025409355 hasConceptScore W2025409355C178790620 @default.
• W2025409355 hasConceptScore W2025409355C180145272 @default.
• W2025409355 hasConceptScore W2025409355C185592680 @default.
• W2025409355 hasConceptScore W2025409355C192562407 @default.
• W2025409355 hasConceptScore W2025409355C2182769 @default.
• W2025409355 hasConceptScore W2025409355C49040817 @default.
• W2025409355 hasConceptScore W2025409355C544956773 @default.
• W2025409355 hasIssue "50" @default.
• W2025409355 hasLocation W20254093551 @default.
• W2025409355 hasLocation W20254093552 @default.
• W2025409355 hasOpenAccess W2025409355 @default.

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