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• W2025440101 abstract "Abstract The structure and the transport properties of microcrystalline silicon films prepared by hot-wire/catalytic chemical vapor deposition (HWCVD/Cat-CVD), using different dilution ratios of silane in hydrogen, were investigated. Spectroscopic ellipsometry analysis revealed an increase in the thickness of amorphous incubation layer formed before nucleation and a reduction of the void volume fraction when hydrogen dilution decreases. Thus, a specific microcrystalline silicon film growth process was proposed, based on a variable dilution of silane in hydrogen. For films prepared in such conditions, the formation of the incubation layer was inhibited, which led to a drastic improvement in carrier transport along the growth direction as proved by the diffusion-induced time-resolved microwave conductivity data." @default.
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• W2025440101 date "2008-01-01" @default.
• W2025440101 modified "2023-10-17" @default.
• W2025440101 title "Improved transport properties of microcrystalline silicon films grown by HWCVD with a variable hydrogen dilution process" @default.
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• W2025440101 doi "https://doi.org/10.1016/j.tsf.2007.06.049" @default.
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