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- W2025568962 abstract "We report the development of a nanoimprint lithography patterning method and inductively coupled plasma etching recipe designed for GaSb-based semiconductor materials. The developed processes were used to fabricate edge-emitting ridge-waveguide lasers and laterally-coupled distributed feedback lasers operating at 1945 nm. For ridge-waveguide laser with 1 mm cavity length, a threshold current of 32 mA was measured. Side-mode suppression ratio in excess of 30 dB was measured for the distributed feedback lasers with 2 mW output power and the output wavelength was temperature-tunable with a tuning coefficient of 0.16 nm /°C." @default.
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- W2025568962 date "2010-07-16" @default.
- W2025568962 modified "2023-09-23" @default.
- W2025568962 title "2 μm InGaSb/GaSb laterally coupled distributed feedback laser fabricated by nanoimprint lithography" @default.
- W2025568962 doi "https://doi.org/10.1117/12.890260" @default.
- W2025568962 hasPublicationYear "2010" @default.
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