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- W2025577983 abstract "Three samples with dielectric layers from high- κ dielectrics, hafnium oxide, gadolinium-silicon oxide, and lanthanum-lutetium oxide on silicon substrate were studied by Raman spectroscopy. The results obtained for high- κ dielectrics were compared with spectra recorded for silicon dioxide. Raman spectra suggest the similarity of gadolinium-silicon oxide and lanthanum-lutetium oxide to the bulk nondensified silicon dioxide. The temperature treatment of hafnium oxide shows the evolution of the structure of this material. Raman spectra recorded for as-deposited hafnium oxide are similar to the results obtained for silicon dioxide layer. After thermal treatment especially at higher temperatures (600°C and above), the structure of hafnium oxide becomes similar to the bulk non-densified silicon dioxide." @default.
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- W2025577983 date "2013-01-01" @default.
- W2025577983 modified "2023-10-11" @default.
- W2025577983 title "Raman Spectra of High-<b><i>κ</i></b>Dielectric Layers Investigated with Micro-Raman Spectroscopy Comparison with Silicon Dioxide" @default.
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- W2025577983 doi "https://doi.org/10.1155/2013/208081" @default.
- W2025577983 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/3773432" @default.
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