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- W2025593306 abstract "Monocrystalline silicon wafers (c-Si) form the material base for the modern microelectronics industry. In recent years, c-Si has also become increasing important as a mechanical material. The possibility of integrating electronic components into micromachined mechanical structures makes c-Si an increasingly interesting material for the fabrication of microsensor and microactuator devices. This paper presents a number of examples which demonstrate how thin films can be used in combination with micromachined silicon substrates or silicon wafers containing pre-fabricated electronic circuits. The examples presented include optoelectronic, integrated optic, mechanical, thermal and chemical sensor devices." @default.
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- W2025593306 date "1997-03-01" @default.
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- W2025593306 title "Sensor fabrication using thin film-on-silicon approaches" @default.
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- W2025593306 doi "https://doi.org/10.1016/s0040-6090(96)09338-8" @default.
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