Matches in SemOpenAlex for { <https://semopenalex.org/work/W2025653090> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2025653090 abstract "This paper describes our investigation of the effect of seven processes' parameters on threshold voltage (VTH) in the fabrication of a 32nm CMOS transistor. The parameters are HALO implantation, S/D Implantation, Compensation implantations, SiO2 thickness, VTH adjustment implantation, polysilicon thickness and silicide annealing time. The setting of process parameters were determined by Taguchi method L18 experimental design. From there, the level of importance of each of the process parameters on threshold voltage was determined using analysis of variance (ANOVA). Transistor fabrication was performed by using Silvaco ATHENA module. Silvaco ATLAS module takes care of electrical characterization for the device. These two simulators results were analyzed with Taguchi method to aid in design and optimizing process parameters. Threshold voltage (VTH) results were used as the evaluation parameters. The results show that the VTH value 0.1099 V for NMOS can be achieved respectively, much closer to the ITRS prediction than our previous L9 experiment result. As the conclusion, by utilizing L18 Taguchi Method shown that process parameters can adjust threshold voltage (VTH) to a stable value of 0.1099 V that is well within ITRS 2003 prediction for 32nm transistor" @default.
- W2025653090 created "2016-06-24" @default.
- W2025653090 creator A5027897088 @default.
- W2025653090 creator A5049304885 @default.
- W2025653090 creator A5087109816 @default.
- W2025653090 date "2012-01-01" @default.
- W2025653090 modified "2023-09-23" @default.
- W2025653090 title "Modeling and optimizing of threshold voltage of 32nm NMOS transistor using L18 orthogonal array Taguchi method" @default.
- W2025653090 doi "https://doi.org/10.1063/1.4757531" @default.
- W2025653090 hasPublicationYear "2012" @default.
- W2025653090 type Work @default.
- W2025653090 sameAs 2025653090 @default.
- W2025653090 citedByCount "1" @default.
- W2025653090 crossrefType "proceedings-article" @default.
- W2025653090 hasAuthorship W2025653090A5027897088 @default.
- W2025653090 hasAuthorship W2025653090A5049304885 @default.
- W2025653090 hasAuthorship W2025653090A5087109816 @default.
- W2025653090 hasConcept C119599485 @default.
- W2025653090 hasConcept C127413603 @default.
- W2025653090 hasConcept C136525101 @default.
- W2025653090 hasConcept C142724271 @default.
- W2025653090 hasConcept C159985019 @default.
- W2025653090 hasConcept C165801399 @default.
- W2025653090 hasConcept C172385210 @default.
- W2025653090 hasConcept C192562407 @default.
- W2025653090 hasConcept C195370968 @default.
- W2025653090 hasConcept C197162436 @default.
- W2025653090 hasConcept C204787440 @default.
- W2025653090 hasConcept C24326235 @default.
- W2025653090 hasConcept C2778413303 @default.
- W2025653090 hasConcept C42632107 @default.
- W2025653090 hasConcept C46362747 @default.
- W2025653090 hasConcept C49040817 @default.
- W2025653090 hasConcept C71924100 @default.
- W2025653090 hasConcept C83469408 @default.
- W2025653090 hasConceptScore W2025653090C119599485 @default.
- W2025653090 hasConceptScore W2025653090C127413603 @default.
- W2025653090 hasConceptScore W2025653090C136525101 @default.
- W2025653090 hasConceptScore W2025653090C142724271 @default.
- W2025653090 hasConceptScore W2025653090C159985019 @default.
- W2025653090 hasConceptScore W2025653090C165801399 @default.
- W2025653090 hasConceptScore W2025653090C172385210 @default.
- W2025653090 hasConceptScore W2025653090C192562407 @default.
- W2025653090 hasConceptScore W2025653090C195370968 @default.
- W2025653090 hasConceptScore W2025653090C197162436 @default.
- W2025653090 hasConceptScore W2025653090C204787440 @default.
- W2025653090 hasConceptScore W2025653090C24326235 @default.
- W2025653090 hasConceptScore W2025653090C2778413303 @default.
- W2025653090 hasConceptScore W2025653090C42632107 @default.
- W2025653090 hasConceptScore W2025653090C46362747 @default.
- W2025653090 hasConceptScore W2025653090C49040817 @default.
- W2025653090 hasConceptScore W2025653090C71924100 @default.
- W2025653090 hasConceptScore W2025653090C83469408 @default.
- W2025653090 hasLocation W20256530901 @default.
- W2025653090 hasOpenAccess W2025653090 @default.
- W2025653090 hasPrimaryLocation W20256530901 @default.
- W2025653090 hasRelatedWork W1481245673 @default.
- W2025653090 hasRelatedWork W1547783441 @default.
- W2025653090 hasRelatedWork W2013615789 @default.
- W2025653090 hasRelatedWork W2017063530 @default.
- W2025653090 hasRelatedWork W2118243209 @default.
- W2025653090 hasRelatedWork W2137594234 @default.
- W2025653090 hasRelatedWork W2163033491 @default.
- W2025653090 hasRelatedWork W2175378912 @default.
- W2025653090 hasRelatedWork W2518748793 @default.
- W2025653090 hasRelatedWork W2954104981 @default.
- W2025653090 isParatext "false" @default.
- W2025653090 isRetracted "false" @default.
- W2025653090 magId "2025653090" @default.
- W2025653090 workType "article" @default.