Matches in SemOpenAlex for { <https://semopenalex.org/work/W2025653259> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2025653259 endingPage "601" @default.
- W2025653259 startingPage "596" @default.
- W2025653259 abstract "An etching device using a hydrogen plasma has been developed for x-ray photoelectron spectroscopy (XPS) depth profile analysis of organic compounds. The effect of the hydrogen plasma discharge was investigated using a photoresist film containing benzene rings, C– O bonds and C– F bonds formed on an Si(100) wafer. The condenser-type discharge tube employed is composed of electrodes, an etch tunnel (shield tube) and a quartz glass tube. Both the electrodes and etch tunnel have many holes. Experimental results show that the etching rate of the photoresist film is 26.7 nm min−1 at an r.f. power of 200 W, a gas flow rate of 6.0 cc min−1 and a hydrogen gas pressure of 26.6 Pa. This rate is higher than that achieved by the use of a conventional high-speed etching ion gun. It is observed that the etched surface is flatter than that obtained by parallel plate electrodes and an Ar ion beam. The amounts of C, O and F after hydrogen plasma etching were not remarkably different from those before etching, and the shape of the C 1s spectrum did not show any change, indicating no change in chemical bonding. The results show that hydrogen plasma etching is very effective for depth profile analysis of organic polymers by XPS. Copyright © 2000 John Wiley & Sons, Ltd." @default.
- W2025653259 created "2016-06-24" @default.
- W2025653259 creator A5035894637 @default.
- W2025653259 creator A5051795618 @default.
- W2025653259 creator A5066362283 @default.
- W2025653259 creator A5067361570 @default.
- W2025653259 creator A5083408077 @default.
- W2025653259 date "2000-01-01" @default.
- W2025653259 modified "2023-09-27" @default.
- W2025653259 title "Hydrogen plasma etching method for depth analysis by x-ray photoelectron spectroscopy" @default.
- W2025653259 cites W1967660579 @default.
- W2025653259 cites W1969027425 @default.
- W2025653259 cites W1979393958 @default.
- W2025653259 cites W1983388862 @default.
- W2025653259 cites W1983708828 @default.
- W2025653259 cites W1983934054 @default.
- W2025653259 cites W1992559642 @default.
- W2025653259 cites W1996732468 @default.
- W2025653259 cites W2006104063 @default.
- W2025653259 cites W2009523765 @default.
- W2025653259 cites W2016034974 @default.
- W2025653259 cites W2016916092 @default.
- W2025653259 cites W2021005175 @default.
- W2025653259 cites W2022368303 @default.
- W2025653259 cites W2036044149 @default.
- W2025653259 cites W2054367460 @default.
- W2025653259 cites W2056983776 @default.
- W2025653259 cites W2092128046 @default.
- W2025653259 cites W2093943898 @default.
- W2025653259 cites W2108419511 @default.
- W2025653259 cites W2575246823 @default.
- W2025653259 doi "https://doi.org/10.1002/1096-9918(200009)29:9<596::aid-sia904>3.0.co;2-h" @default.
- W2025653259 hasPublicationYear "2000" @default.
- W2025653259 type Work @default.
- W2025653259 sameAs 2025653259 @default.
- W2025653259 citedByCount "4" @default.
- W2025653259 crossrefType "journal-article" @default.
- W2025653259 hasAuthorship W2025653259A5035894637 @default.
- W2025653259 hasAuthorship W2025653259A5051795618 @default.
- W2025653259 hasAuthorship W2025653259A5066362283 @default.
- W2025653259 hasAuthorship W2025653259A5067361570 @default.
- W2025653259 hasAuthorship W2025653259A5083408077 @default.
- W2025653259 hasConcept C100460472 @default.
- W2025653259 hasConcept C107187091 @default.
- W2025653259 hasConcept C113196181 @default.
- W2025653259 hasConcept C127413603 @default.
- W2025653259 hasConcept C130472188 @default.
- W2025653259 hasConcept C134406635 @default.
- W2025653259 hasConcept C160671074 @default.
- W2025653259 hasConcept C171250308 @default.
- W2025653259 hasConcept C175708663 @default.
- W2025653259 hasConcept C178790620 @default.
- W2025653259 hasConcept C185592680 @default.
- W2025653259 hasConcept C192562407 @default.
- W2025653259 hasConcept C2779227376 @default.
- W2025653259 hasConcept C33220542 @default.
- W2025653259 hasConcept C42360764 @default.
- W2025653259 hasConcept C43617362 @default.
- W2025653259 hasConcept C512968161 @default.
- W2025653259 hasConceptScore W2025653259C100460472 @default.
- W2025653259 hasConceptScore W2025653259C107187091 @default.
- W2025653259 hasConceptScore W2025653259C113196181 @default.
- W2025653259 hasConceptScore W2025653259C127413603 @default.
- W2025653259 hasConceptScore W2025653259C130472188 @default.
- W2025653259 hasConceptScore W2025653259C134406635 @default.
- W2025653259 hasConceptScore W2025653259C160671074 @default.
- W2025653259 hasConceptScore W2025653259C171250308 @default.
- W2025653259 hasConceptScore W2025653259C175708663 @default.
- W2025653259 hasConceptScore W2025653259C178790620 @default.
- W2025653259 hasConceptScore W2025653259C185592680 @default.
- W2025653259 hasConceptScore W2025653259C192562407 @default.
- W2025653259 hasConceptScore W2025653259C2779227376 @default.
- W2025653259 hasConceptScore W2025653259C33220542 @default.
- W2025653259 hasConceptScore W2025653259C42360764 @default.
- W2025653259 hasConceptScore W2025653259C43617362 @default.
- W2025653259 hasConceptScore W2025653259C512968161 @default.
- W2025653259 hasIssue "9" @default.
- W2025653259 hasLocation W20256532591 @default.
- W2025653259 hasOpenAccess W2025653259 @default.
- W2025653259 hasPrimaryLocation W20256532591 @default.
- W2025653259 hasRelatedWork W1967962577 @default.
- W2025653259 hasRelatedWork W1985927315 @default.
- W2025653259 hasRelatedWork W1995348671 @default.
- W2025653259 hasRelatedWork W2025653259 @default.
- W2025653259 hasRelatedWork W2052794911 @default.
- W2025653259 hasRelatedWork W2079137774 @default.
- W2025653259 hasRelatedWork W2082133582 @default.
- W2025653259 hasRelatedWork W2329163998 @default.
- W2025653259 hasRelatedWork W3176589696 @default.
- W2025653259 hasRelatedWork W4321353335 @default.
- W2025653259 hasVolume "29" @default.
- W2025653259 isParatext "false" @default.
- W2025653259 isRetracted "false" @default.
- W2025653259 magId "2025653259" @default.
- W2025653259 workType "article" @default.