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- W2025750580 abstract "A new STEM XEDS tomography technique is proposed thanks to the implementation of multi EDX SDD detectors in analytical TEMs. The technique flow is presented and the first results obtained on a 28 nm FDSOI transistor are detailed. The latter are compared with 2D XEDS analysis to demonstrate the interest of the slice extraction in all directions from a large analyzed volume without any 3D overlap effect issues." @default.
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- W2025750580 date "2013-04-01" @default.
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- W2025750580 title "Chemical 3D tomography of 28nm high K metal gate transistor: STEM XEDS experimental method and results" @default.
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- W2025750580 doi "https://doi.org/10.1016/j.micron.2013.01.004" @default.
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