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• W2025831930 abstract "Physical and electrical characteristics of atomic-layer-deposited HfO2 deposited using hafnium tetrachloride (HfCl4) and tetrakis[ethylmethylaminohafnium] (TEMAHf) precursors were investigated. The oxidant used for the solid HfCl4 is water, while ozone (O3) is used to oxidize the liquid TEMAHf. Physical properties of these dielectric films were studied by ellipsometry, atomic force microscopy, x-ray diffraction (XRD), secondary-ion-mass spectrometry (SIMS), and transmission electron microscopy. A linear growth rate is observed for the HfO2 deposited using both types of precursors. The HfO2 deposited using TEMAHf has a growth rate of ∼0.8Å∕cycle compared to ∼0.5Å∕cycle for HfO2 deposited using HfCl4. The early growth characteristics of these films as studied by time-of-flight SIMS were found to be similar. The HfO2 deposited by HfCl4 is smoother and denser than HfO2 deposited by TEMAHf. Higher-temperature anneals resulted in significant changes in surface morphology and an increase in roughness of the dielectric films. XRD analysis revealed that after 900 °C annealing, both HfO2 films become monoclinic with differences in preferred orientation. Both types of precursors yielded HfO2 transistors with comparable electrical characteristics. However, the peak transconductance (Gm) degradation for the TEMAHf–HfO2 devices is significantly larger compared to that produced with HfCl4–HfO2. The dielectric constant (k) value for HfCl4–HfO2 films is higher compared to that of the TEMAHf–HfO2 films. The possible reasons for the peak Gm degradation of the TEMAHf–HfO2 films and the observed higher k values for the HfCl4–HfO2 films are discussed in the paper." @default.
• W2025831930 created "2016-06-24" @default.
• W2025831930 creator A5022957034 @default.
• W2025831930 creator A5049224795 @default.
• W2025831930 creator A5073512475 @default.
• W2025831930 creator A5087642755 @default.
• W2025831930 date "2005-06-15" @default.
• W2025831930 modified "2023-10-18" @default.
• W2025831930 title "Physical and electrical characteristics of atomic-layer-deposited hafnium dioxide formed using hafnium tetrachloride and tetrakis(ethylmethylaminohafnium)" @default.
• W2025831930 cites W103493881 @default.
• W2025831930 cites W1515241083 @default.
• W2025831930 cites W1977867673 @default.
• W2025831930 cites W1981879805 @default.
• W2025831930 cites W1993700630 @default.
• W2025831930 cites W1998927885 @default.
• W2025831930 cites W2003645630 @default.
• W2025831930 cites W2009185772 @default.
• W2025831930 cites W2021984882 @default.
• W2025831930 cites W2030204044 @default.
• W2025831930 cites W2037587145 @default.
• W2025831930 cites W2037863274 @default.
• W2025831930 cites W2041246757 @default.
• W2025831930 cites W2065657226 @default.
• W2025831930 cites W2068173579 @default.
• W2025831930 cites W2069100752 @default.
• W2025831930 cites W2069497154 @default.
• W2025831930 cites W2077313146 @default.
• W2025831930 cites W2112554416 @default.
• W2025831930 cites W2118810057 @default.
• W2025831930 cites W2162048190 @default.
• W2025831930 cites W2168667194 @default.
• W2025831930 cites W2324356656 @default.
• W2025831930 doi "https://doi.org/10.1063/1.1947389" @default.
• W2025831930 hasPublicationYear "2005" @default.
• W2025831930 type Work @default.
• W2025831930 sameAs 2025831930 @default.
• W2025831930 citedByCount "33" @default.
• W2025831930 countsByYear W20258319302012 @default.
• W2025831930 countsByYear W20258319302013 @default.
• W2025831930 countsByYear W20258319302014 @default.
• W2025831930 countsByYear W20258319302016 @default.
• W2025831930 countsByYear W20258319302021 @default.
• W2025831930 countsByYear W20258319302023 @default.
• W2025831930 crossrefType "journal-article" @default.
• W2025831930 hasAuthorship W2025831930A5022957034 @default.
• W2025831930 hasAuthorship W2025831930A5049224795 @default.
• W2025831930 hasAuthorship W2025831930A5073512475 @default.
• W2025831930 hasAuthorship W2025831930A5087642755 @default.
• W2025831930 hasConcept C113196181 @default.
• W2025831930 hasConcept C115624301 @default.
• W2025831930 hasConcept C133386390 @default.
• W2025831930 hasConcept C171250308 @default.
• W2025831930 hasConcept C18293161 @default.
• W2025831930 hasConcept C185592680 @default.
• W2025831930 hasConcept C19067145 @default.
• W2025831930 hasConcept C191897082 @default.
• W2025831930 hasConcept C192562407 @default.
• W2025831930 hasConcept C2777855556 @default.
• W2025831930 hasConcept C43617362 @default.
• W2025831930 hasConcept C49040817 @default.
• W2025831930 hasConcept C534791751 @default.
• W2025831930 hasConcept C546638069 @default.
• W2025831930 hasConcept C61276311 @default.
• W2025831930 hasConcept C69544855 @default.
• W2025831930 hasConcept C8010536 @default.
• W2025831930 hasConceptScore W2025831930C113196181 @default.
• W2025831930 hasConceptScore W2025831930C115624301 @default.
• W2025831930 hasConceptScore W2025831930C133386390 @default.
• W2025831930 hasConceptScore W2025831930C171250308 @default.
• W2025831930 hasConceptScore W2025831930C18293161 @default.
• W2025831930 hasConceptScore W2025831930C185592680 @default.
• W2025831930 hasConceptScore W2025831930C19067145 @default.
• W2025831930 hasConceptScore W2025831930C191897082 @default.
• W2025831930 hasConceptScore W2025831930C192562407 @default.
• W2025831930 hasConceptScore W2025831930C2777855556 @default.
• W2025831930 hasConceptScore W2025831930C43617362 @default.
• W2025831930 hasConceptScore W2025831930C49040817 @default.
• W2025831930 hasConceptScore W2025831930C534791751 @default.
• W2025831930 hasConceptScore W2025831930C546638069 @default.
• W2025831930 hasConceptScore W2025831930C61276311 @default.
• W2025831930 hasConceptScore W2025831930C69544855 @default.
• W2025831930 hasConceptScore W2025831930C8010536 @default.
• W2025831930 hasIssue "12" @default.
• W2025831930 hasLocation W20258319301 @default.
• W2025831930 hasOpenAccess W2025831930 @default.
• W2025831930 hasPrimaryLocation W20258319301 @default.
• W2025831930 hasRelatedWork W1975774421 @default.
• W2025831930 hasRelatedWork W1989266634 @default.
• W2025831930 hasRelatedWork W1992260176 @default.
• W2025831930 hasRelatedWork W1993496899 @default.
• W2025831930 hasRelatedWork W2029973675 @default.
• W2025831930 hasRelatedWork W2039564728 @default.
• W2025831930 hasRelatedWork W2044064387 @default.
• W2025831930 hasRelatedWork W2755501271 @default.
• W2025831930 hasRelatedWork W3117430892 @default.
• W2025831930 hasRelatedWork W3123691623 @default.
• W2025831930 hasVolume "97" @default.
• W2025831930 isParatext "false" @default.
• W2025831930 isRetracted "false" @default.
• W2025831930 magId "2025831930" @default.

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