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- W2025865720 abstract "Cleanrooms pose a special challenge for cleanliness testing. Contaminants in the form of particles, metals, ions, and organics must be completely removed to ensure defect-free processing. Ions such as chloride, sulfate, nitrate, and ammonia can degrade water surfaces, particularly in the presence of adsorbed water. A number of analytical methods are used to test for cleanliness and contamination control Ion chromatography is used to determine ionic contamination. The presentation will answer the following questions: • What is ion chromatography? • How is ion chromatography used to evaluate cleanliness? • What are the recent improvements that have been made to the technology? • What are some typical cleanliness testing applications? • How will the use of ion chromatography help my company?" @default.
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- W2025865720 date "2002-09-14" @default.
- W2025865720 modified "2023-10-16" @default.
- W2025865720 title "How Clean Is It? The Use of Ion Chromatography to Monitor Contamination in Cleanroom Environments" @default.
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- W2025865720 doi "https://doi.org/10.17764/jiet.45.1.u1r5u8087g535rl1" @default.
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