FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2025914460> ?p ?o ?g. }

• W2025914460 endingPage "144" @default.
• W2025914460 startingPage "142" @default.
• W2025914460 abstract "Polycrystalline silicon (poly-Si) films were prepared on a fused quartz substrate at 700 °C by low-pressure chemical vapor deposition (LPCVD) and plasma-enhanced CVD (PECVD) using the same fabrication system. Poly-Si films with a strong 〈100〉 and 〈110〉 preferential orientation (P.O.) are obtained by changing the rf power for generating the plasma under the same preparation condition. The surface of the PECVD films with dominant 〈100〉 and 〈110〉 textures is very smooth in contrast with that of LPCVD films. These textures are maintained after thermal oxidation at 1000 °C, and the degree of P.O. and the grain size increase." @default.
• W2025914460 created "2016-06-24" @default.
• W2025914460 creator A5020432336 @default.
• W2025914460 creator A5043919546 @default.
• W2025914460 creator A5044327503 @default.
• W2025914460 date "1989-07-10" @default.
• W2025914460 modified "2023-10-16" @default.
• W2025914460 title "Control of preferential orientation by <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> plasma supply during growth of polycrystalline silicon films" @default.
• W2025914460 cites W1970756170 @default.
• W2025914460 cites W1973456502 @default.
• W2025914460 cites W2017635888 @default.
• W2025914460 cites W2032743095 @default.
• W2025914460 cites W2057328319 @default.
• W2025914460 cites W2067873006 @default.
• W2025914460 cites W2084092174 @default.
• W2025914460 cites W2161817086 @default.
• W2025914460 doi "https://doi.org/10.1063/1.102126" @default.
• W2025914460 hasPublicationYear "1989" @default.
• W2025914460 type Work @default.
• W2025914460 sameAs 2025914460 @default.
• W2025914460 citedByCount "8" @default.
• W2025914460 crossrefType "journal-article" @default.
• W2025914460 hasAuthorship W2025914460A5020432336 @default.
• W2025914460 hasAuthorship W2025914460A5043919546 @default.
• W2025914460 hasAuthorship W2025914460A5044327503 @default.
• W2025914460 hasConcept C111368507 @default.
• W2025914460 hasConcept C113196181 @default.
• W2025914460 hasConcept C121332964 @default.
• W2025914460 hasConcept C127313418 @default.
• W2025914460 hasConcept C136525101 @default.
• W2025914460 hasConcept C137637335 @default.
• W2025914460 hasConcept C142724271 @default.
• W2025914460 hasConcept C151730666 @default.
• W2025914460 hasConcept C159985019 @default.
• W2025914460 hasConcept C171250308 @default.
• W2025914460 hasConcept C185592680 @default.
• W2025914460 hasConcept C191897082 @default.
• W2025914460 hasConcept C192191005 @default.
• W2025914460 hasConcept C192562407 @default.
• W2025914460 hasConcept C204787440 @default.
• W2025914460 hasConcept C2777289219 @default.
• W2025914460 hasConcept C2779227376 @default.
• W2025914460 hasConcept C2779870107 @default.
• W2025914460 hasConcept C2780565262 @default.
• W2025914460 hasConcept C2816523 @default.
• W2025914460 hasConcept C38347018 @default.
• W2025914460 hasConcept C43617362 @default.
• W2025914460 hasConcept C49040817 @default.
• W2025914460 hasConcept C544956773 @default.
• W2025914460 hasConcept C57410435 @default.
• W2025914460 hasConcept C62520636 @default.
• W2025914460 hasConcept C64297162 @default.
• W2025914460 hasConcept C71924100 @default.
• W2025914460 hasConcept C82706917 @default.
• W2025914460 hasConcept C86803240 @default.
• W2025914460 hasConcept C87359718 @default.
• W2025914460 hasConceptScore W2025914460C111368507 @default.
• W2025914460 hasConceptScore W2025914460C113196181 @default.
• W2025914460 hasConceptScore W2025914460C121332964 @default.
• W2025914460 hasConceptScore W2025914460C127313418 @default.
• W2025914460 hasConceptScore W2025914460C136525101 @default.
• W2025914460 hasConceptScore W2025914460C137637335 @default.
• W2025914460 hasConceptScore W2025914460C142724271 @default.
• W2025914460 hasConceptScore W2025914460C151730666 @default.
• W2025914460 hasConceptScore W2025914460C159985019 @default.
• W2025914460 hasConceptScore W2025914460C171250308 @default.
• W2025914460 hasConceptScore W2025914460C185592680 @default.
• W2025914460 hasConceptScore W2025914460C191897082 @default.
• W2025914460 hasConceptScore W2025914460C192191005 @default.
• W2025914460 hasConceptScore W2025914460C192562407 @default.
• W2025914460 hasConceptScore W2025914460C204787440 @default.
• W2025914460 hasConceptScore W2025914460C2777289219 @default.
• W2025914460 hasConceptScore W2025914460C2779227376 @default.
• W2025914460 hasConceptScore W2025914460C2779870107 @default.
• W2025914460 hasConceptScore W2025914460C2780565262 @default.
• W2025914460 hasConceptScore W2025914460C2816523 @default.
• W2025914460 hasConceptScore W2025914460C38347018 @default.
• W2025914460 hasConceptScore W2025914460C43617362 @default.
• W2025914460 hasConceptScore W2025914460C49040817 @default.
• W2025914460 hasConceptScore W2025914460C544956773 @default.
• W2025914460 hasConceptScore W2025914460C57410435 @default.
• W2025914460 hasConceptScore W2025914460C62520636 @default.
• W2025914460 hasConceptScore W2025914460C64297162 @default.
• W2025914460 hasConceptScore W2025914460C71924100 @default.
• W2025914460 hasConceptScore W2025914460C82706917 @default.
• W2025914460 hasConceptScore W2025914460C86803240 @default.
• W2025914460 hasConceptScore W2025914460C87359718 @default.
• W2025914460 hasIssue "2" @default.
• W2025914460 hasLocation W20259144601 @default.
• W2025914460 hasOpenAccess W2025914460 @default.
• W2025914460 hasPrimaryLocation W20259144601 @default.
• W2025914460 hasRelatedWork W1973544168 @default.
• W2025914460 hasRelatedWork W2000645312 @default.
• W2025914460 hasRelatedWork W2006219958 @default.
• W2025914460 hasRelatedWork W2025914460 @default.
• W2025914460 hasRelatedWork W2040918790 @default.
• W2025914460 hasRelatedWork W2046376730 @default.
• W2025914460 hasRelatedWork W2156185091 @default.

• next