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• W2025953295 abstract "Abstract This paper reports the fabrication and preliminary characterization of a novel vibratory rate-sensor. The sensor employs the modulated integrative differential optical sensing (MIDOS) to detect the output mode amplitude. The mechanical part of the sensor is fabricated by bulk micromachining using a double side anisotropic wet etching process. A CMOS chip containing the detecting photodiodes and their readout electronics is fabricated through MOSIS. Electrical and mechanical integration of the two parts is achieved by using the indium bumps technology. The proof mass is aligned with the detecting photodiodes, so that when at rest, equal portions of the two photodiodes are exposed. Several prototypes have been fabricated and tested on a rotating table. Good linearity (" @default.
• W2025953295 created "2016-06-24" @default.
• W2025953295 creator A5004338648 @default.
• W2025953295 creator A5048908975 @default.
• W2025953295 creator A5059396435 @default.
• W2025953295 creator A5087985744 @default.
• W2025953295 date "2000-05-01" @default.
• W2025953295 modified "2023-10-04" @default.
• W2025953295 title "A novel micromachined vibrating rate-gyroscope with optical sensing and electrostatic actuation" @default.
• W2025953295 cites W1590971286 @default.
• W2025953295 cites W1912250818 @default.
• W2025953295 cites W1948193777 @default.
• W2025953295 cites W1966339285 @default.
• W2025953295 cites W1974607353 @default.
• W2025953295 cites W1977834858 @default.
• W2025953295 cites W1991925581 @default.
• W2025953295 cites W2025502181 @default.
• W2025953295 cites W2039400597 @default.
• W2025953295 cites W2046490692 @default.
• W2025953295 cites W2083431340 @default.
• W2025953295 cites W2102162901 @default.
• W2025953295 cites W2114789390 @default.
• W2025953295 cites W2130700751 @default.
• W2025953295 cites W2132975762 @default.
• W2025953295 cites W2146552095 @default.
• W2025953295 cites W2146619509 @default.
• W2025953295 cites W2149128480 @default.
• W2025953295 cites W2155555191 @default.
• W2025953295 cites W2171405303 @default.
• W2025953295 doi "https://doi.org/10.1016/s0924-4247(00)00297-1" @default.
• W2025953295 hasPublicationYear "2000" @default.
• W2025953295 type Work @default.
• W2025953295 sameAs 2025953295 @default.
• W2025953295 citedByCount "22" @default.
• W2025953295 countsByYear W20259532952013 @default.
• W2025953295 countsByYear W20259532952014 @default.
• W2025953295 countsByYear W20259532952015 @default.
• W2025953295 countsByYear W20259532952016 @default.
• W2025953295 countsByYear W20259532952018 @default.
• W2025953295 countsByYear W20259532952019 @default.
• W2025953295 countsByYear W20259532952020 @default.
• W2025953295 crossrefType "journal-article" @default.
• W2025953295 hasAuthorship W2025953295A5004338648 @default.
• W2025953295 hasAuthorship W2025953295A5048908975 @default.
• W2025953295 hasAuthorship W2025953295A5059396435 @default.
• W2025953295 hasAuthorship W2025953295A5087985744 @default.
• W2025953295 hasConcept C119599485 @default.
• W2025953295 hasConcept C121332964 @default.
• W2025953295 hasConcept C127413603 @default.
• W2025953295 hasConcept C136525101 @default.
• W2025953295 hasConcept C142724271 @default.
• W2025953295 hasConcept C145667562 @default.
• W2025953295 hasConcept C158488048 @default.
• W2025953295 hasConcept C165005293 @default.
• W2025953295 hasConcept C192562407 @default.
• W2025953295 hasConcept C204787440 @default.
• W2025953295 hasConcept C2780330379 @default.
• W2025953295 hasConcept C37977207 @default.
• W2025953295 hasConcept C41075158 @default.
• W2025953295 hasConcept C46362747 @default.
• W2025953295 hasConcept C49040817 @default.
• W2025953295 hasConcept C62520636 @default.
• W2025953295 hasConcept C71924100 @default.
• W2025953295 hasConcept C751236 @default.
• W2025953295 hasConceptScore W2025953295C119599485 @default.
• W2025953295 hasConceptScore W2025953295C121332964 @default.
• W2025953295 hasConceptScore W2025953295C127413603 @default.
• W2025953295 hasConceptScore W2025953295C136525101 @default.
• W2025953295 hasConceptScore W2025953295C142724271 @default.
• W2025953295 hasConceptScore W2025953295C145667562 @default.
• W2025953295 hasConceptScore W2025953295C158488048 @default.
• W2025953295 hasConceptScore W2025953295C165005293 @default.
• W2025953295 hasConceptScore W2025953295C192562407 @default.
• W2025953295 hasConceptScore W2025953295C204787440 @default.
• W2025953295 hasConceptScore W2025953295C2780330379 @default.
• W2025953295 hasConceptScore W2025953295C37977207 @default.
• W2025953295 hasConceptScore W2025953295C41075158 @default.
• W2025953295 hasConceptScore W2025953295C46362747 @default.
• W2025953295 hasConceptScore W2025953295C49040817 @default.
• W2025953295 hasConceptScore W2025953295C62520636 @default.
• W2025953295 hasConceptScore W2025953295C71924100 @default.
• W2025953295 hasConceptScore W2025953295C751236 @default.
• W2025953295 hasLocation W20259532951 @default.
• W2025953295 hasOpenAccess W2025953295 @default.
• W2025953295 hasPrimaryLocation W20259532951 @default.
• W2025953295 hasRelatedWork W1693437656 @default.
• W2025953295 hasRelatedWork W1887667083 @default.
• W2025953295 hasRelatedWork W1970691973 @default.
• W2025953295 hasRelatedWork W1972878520 @default.
• W2025953295 hasRelatedWork W2023671852 @default.
• W2025953295 hasRelatedWork W2037049840 @default.
• W2025953295 hasRelatedWork W2051055338 @default.
• W2025953295 hasRelatedWork W2058032050 @default.
• W2025953295 hasRelatedWork W2076755257 @default.
• W2025953295 hasRelatedWork W2077766894 @default.
• W2025953295 hasRelatedWork W2080277455 @default.
• W2025953295 hasRelatedWork W2081708035 @default.
• W2025953295 hasRelatedWork W2101098067 @default.
• W2025953295 hasRelatedWork W2105263498 @default.
• W2025953295 hasRelatedWork W2149128480 @default.

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