Matches in SemOpenAlex for { <https://semopenalex.org/work/W2025997657> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2025997657 endingPage "1075" @default.
- W2025997657 startingPage "1067" @default.
- W2025997657 abstract "Quantitative deformation analysis of micro-fabricated electromechanical systems is of importance for the design and functional control of microsystems. In this paper, two modified digital moiré processing methods, Gaussian blurring algorithm combined with digital phase shifting and geometrical phase analysis (GPA) technique based on digital moiré method, are developed to quantitatively analyse the deformation behaviour of micro-electro-mechanical system (MEMS) structures. Measuring principles and experimental procedures of the two methods are described in detail. A digital moiré fringe pattern is generated by superimposing a specimen grating etched directly on a microstructure surface with a digital reference grating (DRG). Most of the grating noise is removed from the digital moiré fringes, which enables the phase distribution of the moiré fringes to be obtained directly. Strain measurement result of a MEMS structure demonstrates the feasibility of the two methods." @default.
- W2025997657 created "2016-06-24" @default.
- W2025997657 creator A5020377679 @default.
- W2025997657 creator A5037517299 @default.
- W2025997657 creator A5070554329 @default.
- W2025997657 date "2010-11-01" @default.
- W2025997657 modified "2023-10-15" @default.
- W2025997657 title "Deformation analysis of MEMS structures by modified digital moiré methods" @default.
- W2025997657 cites W1495702968 @default.
- W2025997657 cites W1967364318 @default.
- W2025997657 cites W1970014398 @default.
- W2025997657 cites W1984598672 @default.
- W2025997657 cites W2012889211 @default.
- W2025997657 cites W2016125075 @default.
- W2025997657 cites W2067009451 @default.
- W2025997657 cites W2080568898 @default.
- W2025997657 cites W2098475746 @default.
- W2025997657 cites W2104604827 @default.
- W2025997657 cites W2128124372 @default.
- W2025997657 cites W2137086712 @default.
- W2025997657 cites W2154183381 @default.
- W2025997657 cites W2332263041 @default.
- W2025997657 doi "https://doi.org/10.1016/j.optlaseng.2009.12.007" @default.
- W2025997657 hasPublicationYear "2010" @default.
- W2025997657 type Work @default.
- W2025997657 sameAs 2025997657 @default.
- W2025997657 citedByCount "15" @default.
- W2025997657 countsByYear W20259976572012 @default.
- W2025997657 countsByYear W20259976572013 @default.
- W2025997657 countsByYear W20259976572014 @default.
- W2025997657 countsByYear W20259976572016 @default.
- W2025997657 countsByYear W20259976572017 @default.
- W2025997657 countsByYear W20259976572019 @default.
- W2025997657 countsByYear W20259976572020 @default.
- W2025997657 countsByYear W20259976572022 @default.
- W2025997657 countsByYear W20259976572023 @default.
- W2025997657 crossrefType "journal-article" @default.
- W2025997657 hasAuthorship W2025997657A5020377679 @default.
- W2025997657 hasAuthorship W2025997657A5037517299 @default.
- W2025997657 hasAuthorship W2025997657A5070554329 @default.
- W2025997657 hasConcept C115961682 @default.
- W2025997657 hasConcept C120665830 @default.
- W2025997657 hasConcept C121332964 @default.
- W2025997657 hasConcept C151054161 @default.
- W2025997657 hasConcept C154945302 @default.
- W2025997657 hasConcept C159985019 @default.
- W2025997657 hasConcept C163716315 @default.
- W2025997657 hasConcept C171250308 @default.
- W2025997657 hasConcept C192562407 @default.
- W2025997657 hasConcept C204366326 @default.
- W2025997657 hasConcept C2777813233 @default.
- W2025997657 hasConcept C37977207 @default.
- W2025997657 hasConcept C41008148 @default.
- W2025997657 hasConcept C42781572 @default.
- W2025997657 hasConcept C49040817 @default.
- W2025997657 hasConcept C62520636 @default.
- W2025997657 hasConcept C70000540 @default.
- W2025997657 hasConcept C9417928 @default.
- W2025997657 hasConceptScore W2025997657C115961682 @default.
- W2025997657 hasConceptScore W2025997657C120665830 @default.
- W2025997657 hasConceptScore W2025997657C121332964 @default.
- W2025997657 hasConceptScore W2025997657C151054161 @default.
- W2025997657 hasConceptScore W2025997657C154945302 @default.
- W2025997657 hasConceptScore W2025997657C159985019 @default.
- W2025997657 hasConceptScore W2025997657C163716315 @default.
- W2025997657 hasConceptScore W2025997657C171250308 @default.
- W2025997657 hasConceptScore W2025997657C192562407 @default.
- W2025997657 hasConceptScore W2025997657C204366326 @default.
- W2025997657 hasConceptScore W2025997657C2777813233 @default.
- W2025997657 hasConceptScore W2025997657C37977207 @default.
- W2025997657 hasConceptScore W2025997657C41008148 @default.
- W2025997657 hasConceptScore W2025997657C42781572 @default.
- W2025997657 hasConceptScore W2025997657C49040817 @default.
- W2025997657 hasConceptScore W2025997657C62520636 @default.
- W2025997657 hasConceptScore W2025997657C70000540 @default.
- W2025997657 hasConceptScore W2025997657C9417928 @default.
- W2025997657 hasIssue "11" @default.
- W2025997657 hasLocation W20259976571 @default.
- W2025997657 hasOpenAccess W2025997657 @default.
- W2025997657 hasPrimaryLocation W20259976571 @default.
- W2025997657 hasRelatedWork W2067321896 @default.
- W2025997657 hasRelatedWork W2089788581 @default.
- W2025997657 hasRelatedWork W2329370163 @default.
- W2025997657 hasRelatedWork W2385273060 @default.
- W2025997657 hasRelatedWork W2536591899 @default.
- W2025997657 hasRelatedWork W2539022596 @default.
- W2025997657 hasRelatedWork W4253850484 @default.
- W2025997657 hasRelatedWork W4285601695 @default.
- W2025997657 hasRelatedWork W79527078 @default.
- W2025997657 hasRelatedWork W2461375647 @default.
- W2025997657 hasVolume "48" @default.
- W2025997657 isParatext "false" @default.
- W2025997657 isRetracted "false" @default.
- W2025997657 magId "2025997657" @default.
- W2025997657 workType "article" @default.