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• W2026007435 endingPage "2506" @default.
• W2026007435 startingPage "2503" @default.
• W2026007435 abstract "We have studied the effects of high fluence nitrogen ion implantation on the structural changes in Al/Ti multilayers, with the aim of achieving multilayered metal-nitrides. The starting structures consisted of 10 alternate sputter-deposited Al and Ti films, with a total thickness of 270 nm, on (1 0 0) Si substrates. They were implanted with 200 keV N2+, to 1 × 1017 and 2 × 1017 at/cm2, the projected range being around half-depth of the multilayers. Structural characterization was performed by Rutherford backscattering, Auger electron spectroscopy and transmission electron microscopy. It was found that ion implantation to the higher fluence induces a full intermixing of Al/Ti layers, resulting in a multilayered structure with different content of Al, Ti and N. The applied method can be interesting for preparation of graded (Al,Ti)N multilayers, with a controlled content of nitrogen and a controlled level of Al–Ti intermixing within the structures." @default.
• W2026007435 created "2016-06-24" @default.
• W2026007435 creator A5010811189 @default.
• W2026007435 creator A5027929936 @default.
• W2026007435 creator A5033225733 @default.
• W2026007435 creator A5045114403 @default.
• W2026007435 creator A5060805381 @default.
• W2026007435 creator A5065566308 @default.
• W2026007435 creator A5078140410 @default.
• W2026007435 creator A5083344770 @default.
• W2026007435 date "2008-05-01" @default.
• W2026007435 modified "2023-10-17" @default.
• W2026007435 title "High fluence nitrogen implantation in Al/Ti multilayers" @default.
• W2026007435 cites W1482525865 @default.
• W2026007435 cites W1971936954 @default.
• W2026007435 cites W1987118958 @default.
• W2026007435 cites W1994993764 @default.
• W2026007435 cites W1997105298 @default.
• W2026007435 cites W1999905447 @default.
• W2026007435 cites W2001818087 @default.
• W2026007435 cites W2019878234 @default.
• W2026007435 cites W2027945235 @default.
• W2026007435 cites W2034183626 @default.
• W2026007435 cites W2057173737 @default.
• W2026007435 cites W2088507762 @default.
• W2026007435 cites W2169417688 @default.
• W2026007435 doi "https://doi.org/10.1016/j.nimb.2008.03.034" @default.
• W2026007435 hasPublicationYear "2008" @default.
• W2026007435 type Work @default.
• W2026007435 sameAs 2026007435 @default.
• W2026007435 citedByCount "1" @default.
• W2026007435 crossrefType "journal-article" @default.
• W2026007435 hasAuthorship W2026007435A5010811189 @default.
• W2026007435 hasAuthorship W2026007435A5027929936 @default.
• W2026007435 hasAuthorship W2026007435A5033225733 @default.
• W2026007435 hasAuthorship W2026007435A5045114403 @default.
• W2026007435 hasAuthorship W2026007435A5060805381 @default.
• W2026007435 hasAuthorship W2026007435A5065566308 @default.
• W2026007435 hasAuthorship W2026007435A5078140410 @default.
• W2026007435 hasAuthorship W2026007435A5083344770 @default.
• W2026007435 hasConcept C113196181 @default.
• W2026007435 hasConcept C121332964 @default.
• W2026007435 hasConcept C145148216 @default.
• W2026007435 hasConcept C146088050 @default.
• W2026007435 hasConcept C149478292 @default.
• W2026007435 hasConcept C171250308 @default.
• W2026007435 hasConcept C178790620 @default.
• W2026007435 hasConcept C185544564 @default.
• W2026007435 hasConcept C185592680 @default.
• W2026007435 hasConcept C19067145 @default.
• W2026007435 hasConcept C192562407 @default.
• W2026007435 hasConcept C194760766 @default.
• W2026007435 hasConcept C22078206 @default.
• W2026007435 hasConcept C22423302 @default.
• W2026007435 hasConcept C25442681 @default.
• W2026007435 hasConcept C2777396822 @default.
• W2026007435 hasConcept C2779227376 @default.
• W2026007435 hasConcept C2780547777 @default.
• W2026007435 hasConcept C41823505 @default.
• W2026007435 hasConcept C43617362 @default.
• W2026007435 hasConcept C537208039 @default.
• W2026007435 hasConcept C70854507 @default.
• W2026007435 hasConcept C8010536 @default.
• W2026007435 hasConceptScore W2026007435C113196181 @default.
• W2026007435 hasConceptScore W2026007435C121332964 @default.
• W2026007435 hasConceptScore W2026007435C145148216 @default.
• W2026007435 hasConceptScore W2026007435C146088050 @default.
• W2026007435 hasConceptScore W2026007435C149478292 @default.
• W2026007435 hasConceptScore W2026007435C171250308 @default.
• W2026007435 hasConceptScore W2026007435C178790620 @default.
• W2026007435 hasConceptScore W2026007435C185544564 @default.
• W2026007435 hasConceptScore W2026007435C185592680 @default.
• W2026007435 hasConceptScore W2026007435C19067145 @default.
• W2026007435 hasConceptScore W2026007435C192562407 @default.
• W2026007435 hasConceptScore W2026007435C194760766 @default.
• W2026007435 hasConceptScore W2026007435C22078206 @default.
• W2026007435 hasConceptScore W2026007435C22423302 @default.
• W2026007435 hasConceptScore W2026007435C25442681 @default.
• W2026007435 hasConceptScore W2026007435C2777396822 @default.
• W2026007435 hasConceptScore W2026007435C2779227376 @default.
• W2026007435 hasConceptScore W2026007435C2780547777 @default.
• W2026007435 hasConceptScore W2026007435C41823505 @default.
• W2026007435 hasConceptScore W2026007435C43617362 @default.
• W2026007435 hasConceptScore W2026007435C537208039 @default.
• W2026007435 hasConceptScore W2026007435C70854507 @default.
• W2026007435 hasConceptScore W2026007435C8010536 @default.
• W2026007435 hasIssue "10" @default.
• W2026007435 hasLocation W20260074351 @default.
• W2026007435 hasOpenAccess W2026007435 @default.
• W2026007435 hasPrimaryLocation W20260074351 @default.
• W2026007435 hasRelatedWork W1987908437 @default.
• W2026007435 hasRelatedWork W2022971227 @default.
• W2026007435 hasRelatedWork W2029984617 @default.
• W2026007435 hasRelatedWork W2070353560 @default.
• W2026007435 hasRelatedWork W2075866078 @default.
• W2026007435 hasRelatedWork W2075934259 @default.
• W2026007435 hasRelatedWork W2089413657 @default.
• W2026007435 hasRelatedWork W2089743211 @default.

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