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• W2026014986 abstract "A novel surface profile measurement instrument, developed for the characterization of engineering surfaces, is presented. The instrument is of a hybrid type and is capable of contact and non-contact measurement, making it suitable for a wider range of applications. It has an optical displacement sensor and a stylus displacement sensor. For contact measurement, the vertical measurement range and resolution of the instrument are 1 mm and 10 nm, respectively. For non-contact measurement, they are 500 μm and 3 nm, respectively. The instrument has been successfully used for several forensic applications, demonstrating its unique flexibility and high reliability as a novel surface topography instrument." @default.
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• W2026014986 date "2001-10-01" @default.
• W2026014986 modified "2023-10-02" @default.
• W2026014986 title "A novel contact/non-contact hybrid measurement system for surface topography characterization" @default.
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• W2026014986 doi "https://doi.org/10.1016/s0890-6955(01)00064-5" @default.
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