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- W2026015771 abstract "A novel SiC and CeO2 vitrified #10000 diamond wheel was developed, and three various nanogrinding conditions on silicon wafers were conducted. Non-contact surface profiler, high-resolution environmental scanning electron microscopy, and transmission electron microscopy were employed to measure and characterize the surface and subsurface characteristics of ground silicon wafers. The experimental results show that surface roughness values of Ra 1.2 nm and PV 10 nm were achieved under nanogrinding; the thickness of the damaged layer was 60 nm, consisting of an amorphous layer and a damaged layer." @default.
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- W2026015771 date "2011-08-01" @default.
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- W2026015771 title "Nanogrinding of Silicon Wafer Using a Novel Vitrified Diamond Wheel" @default.
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- W2026015771 doi "https://doi.org/10.1080/10426914.2010.523916" @default.
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