Matches in SemOpenAlex for { <https://semopenalex.org/work/W2026047090> ?p ?o ?g. }
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- W2026047090 endingPage "367" @default.
- W2026047090 startingPage "363" @default.
- W2026047090 abstract "Implantations of arsenic at 11 MeV have been performed into Si(100) substrates at room and liquid nitrogen temperatures. The residual damage after annealing has been observed using Rutherford backscattering and cross-sectional transmission electron microscopy. In situ annealing is shown to be more important for room temperature implantation compared with liquid nitrogen temperature implantation. Spreading resistance has been used to determine active carrier concentrations, and the measured range of 4.4 μm agrees with Linhard-Scharff-Schi∅tt calculations. Buried interconnects with a sheet resistance of 50 Ω/▭ have been fabricated and tested." @default.
- W2026047090 created "2016-06-24" @default.
- W2026047090 creator A5009041573 @default.
- W2026047090 creator A5088586946 @default.
- W2026047090 creator A5089597654 @default.
- W2026047090 date "1982-09-01" @default.
- W2026047090 modified "2023-10-09" @default.
- W2026047090 title "Megavolt arsenic implantation into silicon" @default.
- W2026047090 cites W1988474053 @default.
- W2026047090 cites W1998647233 @default.
- W2026047090 doi "https://doi.org/10.1016/0040-6090(82)90042-6" @default.
- W2026047090 hasPublicationYear "1982" @default.
- W2026047090 type Work @default.
- W2026047090 sameAs 2026047090 @default.
- W2026047090 citedByCount "19" @default.
- W2026047090 countsByYear W20260470902012 @default.
- W2026047090 countsByYear W20260470902013 @default.
- W2026047090 crossrefType "journal-article" @default.
- W2026047090 hasAuthorship W2026047090A5009041573 @default.
- W2026047090 hasAuthorship W2026047090A5088586946 @default.
- W2026047090 hasAuthorship W2026047090A5089597654 @default.
- W2026047090 hasConcept C107872376 @default.
- W2026047090 hasConcept C108939769 @default.
- W2026047090 hasConcept C113196181 @default.
- W2026047090 hasConcept C145148216 @default.
- W2026047090 hasConcept C146088050 @default.
- W2026047090 hasConcept C171250308 @default.
- W2026047090 hasConcept C178790620 @default.
- W2026047090 hasConcept C185592680 @default.
- W2026047090 hasConcept C191897082 @default.
- W2026047090 hasConcept C192562407 @default.
- W2026047090 hasConcept C207521374 @default.
- W2026047090 hasConcept C2777855556 @default.
- W2026047090 hasConcept C2779227376 @default.
- W2026047090 hasConcept C41823505 @default.
- W2026047090 hasConcept C49040817 @default.
- W2026047090 hasConcept C502230775 @default.
- W2026047090 hasConcept C537208039 @default.
- W2026047090 hasConcept C544956773 @default.
- W2026047090 hasConcept C66825105 @default.
- W2026047090 hasConceptScore W2026047090C107872376 @default.
- W2026047090 hasConceptScore W2026047090C108939769 @default.
- W2026047090 hasConceptScore W2026047090C113196181 @default.
- W2026047090 hasConceptScore W2026047090C145148216 @default.
- W2026047090 hasConceptScore W2026047090C146088050 @default.
- W2026047090 hasConceptScore W2026047090C171250308 @default.
- W2026047090 hasConceptScore W2026047090C178790620 @default.
- W2026047090 hasConceptScore W2026047090C185592680 @default.
- W2026047090 hasConceptScore W2026047090C191897082 @default.
- W2026047090 hasConceptScore W2026047090C192562407 @default.
- W2026047090 hasConceptScore W2026047090C207521374 @default.
- W2026047090 hasConceptScore W2026047090C2777855556 @default.
- W2026047090 hasConceptScore W2026047090C2779227376 @default.
- W2026047090 hasConceptScore W2026047090C41823505 @default.
- W2026047090 hasConceptScore W2026047090C49040817 @default.
- W2026047090 hasConceptScore W2026047090C502230775 @default.
- W2026047090 hasConceptScore W2026047090C537208039 @default.
- W2026047090 hasConceptScore W2026047090C544956773 @default.
- W2026047090 hasConceptScore W2026047090C66825105 @default.
- W2026047090 hasIssue "4" @default.
- W2026047090 hasLocation W20260470901 @default.
- W2026047090 hasOpenAccess W2026047090 @default.
- W2026047090 hasPrimaryLocation W20260470901 @default.
- W2026047090 hasRelatedWork W1979510159 @default.
- W2026047090 hasRelatedWork W1997644287 @default.
- W2026047090 hasRelatedWork W2007030434 @default.
- W2026047090 hasRelatedWork W2007508056 @default.
- W2026047090 hasRelatedWork W2014027547 @default.
- W2026047090 hasRelatedWork W2039846036 @default.
- W2026047090 hasRelatedWork W2043794249 @default.
- W2026047090 hasRelatedWork W2047798110 @default.
- W2026047090 hasRelatedWork W2346167473 @default.
- W2026047090 hasRelatedWork W4308136370 @default.
- W2026047090 hasVolume "95" @default.
- W2026047090 isParatext "false" @default.
- W2026047090 isRetracted "false" @default.
- W2026047090 magId "2026047090" @default.
- W2026047090 workType "article" @default.